Inductively Coupled Plasma Reactive Ion Etching of Gallium Indium Zinc Oxide Thin Films Using Cl2/Ar Gas Mix
スポンサーリンク
概要
- 論文の詳細を見る
Inductively coupled plasma reactive ion etching of gallium indium zinc oxide (GIZO) thin films patterned with a photoresist was studied using a Cl2/Ar gas. As the Cl2 concentration was increased from pure Ar to 40% Cl2 concentration, the etch rate of GIZO films increased, and thereafter gradually decreased. The etch rate increased with increasing coil rf power and dc bias voltage. A high degree of anisotropy was achieved with increasing coil rf power and dc-bias voltage, and decreasing gas pressure. X-ray photoelectron spectroscopy of the etched films revealed that chemical compounds were formed during the etching process, indicating that the etching of GIZO films is governed by a reactive ion etching mechanism.
- 2010-08-25
著者
-
Chung Chee
Department Of Chemical Engineering And Institute Of Clean Technology Inha University
-
Kim Eun
Department Of Anesthesia And Pain Medicine School Of Medicine Pusan National University
-
Kong Seon
Department of Chemical Engineering, Inha University, 253 Yonghyun-dong, Nam-gu, Incheon 402-751, Korea
-
Xiao Yu
Department of Chemical Engineering, Inha University, 253 Yonghyun-dong, Nam-gu, Incheon 402-751, Korea
関連論文
- Identification of variants in cyclin D1 (CCND1) and B-Cell CLL/lymphoma 2 (BCL2)
- Comprehensive assessment of P21 polymorphisms and lung cancer risk
- Role of Insertion Layer Controlling Wavelength in InGaAs Quantum Dots
- Effects of Doping Profile on Characteristics of InAs Quantum Dots
- 30-P2-45 Computerized Adverse Drug Reaction (ADR) monitoring system in Kangnam St. Mary's Hospital
- P-11 The Effect of Combined Exercise on Health related Fitness, Resistin Concentration in Middle Aged Obese Women(Proceedings of the 55th Meeting of Japan Society of Physiological Anthropology)
- P-10 The Effects of Combined Exercise on Abdominal Fat, Adiponectin and TNF-a Concentration in Middle Aged Obese Women(Proceedings of the 55th Meeting of Japan Society of Physiological Anthropology)
- Disseminated Granuloma Annulare Associated with Chronic Myelogenous Leukemia
- Superiority of HMPAO Ictal SPECT to ECD Ictal SPECT in Localizing the Epileptogenic Zone
- Metaplastic Ossification in a Cutaneous Pyogenic Granuloma : A Case Report
- Protective Effects of Cuscutae semen against Dimethylnitrosamine-Induced Acute Liver Injury in Sprague-Dawley Rats(Pharmacology)
- Merkel cell carcinoma of the inguinal lymph node with an unknown primary site
- PB3-7 Pain Relieving Effects of Acupuncture in Formalin Test of the Rat(Proceedings of The 8th International Congress of Physiological Anthropology)
- Structure and Bilogical Activity of the Neuropeptide γ
- Purification and Characterization of SP-Related Peptide from the African Lungfish, Protopterus Dolloi.
- Purification and Characterization of a Novel Antimicrobial Peptide from the Skin of Hagfish, Eptatretus Burgeri.
- Squalene-induced exogenous lipoid pneumonia in an infant
- Induction of Apoptosis by Radix Paeoniae Alba Extract through Cytochrome c Release and the Activations of Caspase-9 and Caspase-3 in HL-60 Cells(Molecular and Cell Biology)
- Acquired reactive perforating collagenosis triggered by insect bite
- Juvenile xanthogranuloma of the finger : An unusual localization
- Improved Crystalline Quality of GaN by Substrate Ion Beam Pretreatment
- Implantation of N Ions on Sapphire Substrate for Improvement of GaN Epilayer
- Anterior Cervical Corpectomy and Fusion Using Miniplate and Screws in a 7-Year-Old Child With Eosinophilic Granuloma of the Cervical Spine
- Selective Cadmium Accumulation Using Recombinant Escherichia coli (Environmental Biotechnology)
- Lethal Multiple Pterygium Syndrome with Complete Intestinal Duplication
- Overexpression of a Brassica rapa NGATHA Gene in Arabidopsis thaliana Negatively Affects Cell Proliferation During Lateral Organ and Root Growth
- Inhibition of Cytokine-Mediated Nitric Oxide Synthase Expression in Rat Insulinoma Cells by Scoparone(Molecular and Cell Biology)
- A New Verification Framework of Object-Oriented Design Specification for Small Scale Software (Special Issue on Fault-Tolerant Computing)
- Effect of Etch Gas on Dry Etching of Ferroelectric Bi_La_Ti_3O_ Thin Films
- UV decreases the synthesis of free fatty acids and triglycerides in the epidermis of human skin in vivo, contributing to development of skin photoaging
- Ex Vivo Expansion of Human Umbilical Cord Blood CD34+ Cells in a Collagen Bead-Containing 3-Dimensional Culture System
- Holographic PDLC Containing Fluorine Segments
- Lithospermi radix Extract Inhibits Histamine Release and Production of Inflammatory Cytokine in Mast Cells
- Inhibitory Effect of Poncirus trifoliate on Acetylcholinesterase and Attenuating Activity against Trimethyltin-Induced Learning and Memory Impairment
- The prevalence of white spot lesions on the mesial surfaces of the 1st molars children and a minimal invasive approach-a pilot study
- Combined general and epidural anesthesia for major abdominal surgery in a patient with Pompe disease
- Clinicopathological features of syphilitic gastritis in Korean patients
- Insertional Mutation in the Intron 1 of Unc5h3 Gene Induces Ataxic, Lean and Hyperactive Phenotype in mice
- Design and Development of an Emotional Interaction Robot, Mung
- The Effect of Silica Dust on Ventilatory Function of Foundry Workers
- Improved output power of GaN-based vertical light emitting diodes fabricated with current blocking region formed by O2 plasma treatment
- Endoscopic and histopathological characteristics suggesting the presence of gastric mucosal high grade neoplasia foci in cases initially diagnosed as gastric mucosal low grade neoplasia by forceps biopsy in Korea
- Emotional Feature Extraction Method Based on the Concentration of Phoneme Influence for Human-Robot Interaction
- Inductively Coupled Plasma Reactive Ion Etching of Gallium Indium Zinc Oxide Thin Films Using Cl2/Ar Gas Mix
- JKCF1-1 Attenuation of antigen-induced airway hyperresponsiveness and inflammation in CXCR 3 knockout mice(Inflammatory cells in allergic diseases,Free Paper Session 1,Japan-Korea-China Joint Symposium)
- Extent of disease and results of adjuvant radiotherapy after radical hysterectomy and pelvic lymphadenectomy in the treatment of stage IB, IIA, and IIB cervical carcinoma
- FIXED POINT THEOREMS FOR NON-LIPSCHITZIAN MAPPINGS IN BANACH SPACES.
- MINIMIZATION THEOREMS RELATING TO FIXED POINT THEOREMS ON COMPLETE METRIC SPACES.
- Transmission Electron Microscopy Study on the Crystallization of Sb–Se–Te Ternary Alloys
- Study on Energy Band of InGaN/GaN Self-Assembled Quantum Dots by Deep-Level Transient Spectroscopy
- Multi-Valued Planar Hall Resistance Manipulated by Current Induced Magnetic Field in Fe Films Grown on GaAs(001) Substrates
- Effect of Oxygen Concentration on Properties of Indium Zinc Oxide Thin Films for Flexible Dye-Sensitized Solar Cell
- Effect of Etch Gas on Dry Etching of Ferroelectric Bi3.25La0.75Ti3O12 Thin Films
- Generation of reduced macrolide analogs by regio-specific biotransformation
- A Smartcard-Based User Authentication Scheme to Ensure the PFS in Multi-Server Environments
- Speed Enhancement of WSi2 Nanocrystal Memory with Barrier-Engineered Si3N4/HfAlO Tunnel Layer
- Correlation of genotypes for thiopurine methyltransferase and inosine triphosphate pyrophosphatase with long-term clinical outcomes in Korean patients with inflammatory bowel diseases during treatment with thiopurine drugs
- Multi-Valued Planar Hall Resistance Manipulated by Current Induced Magnetic Field in Fe Films Grown on GaAs(001) Substrates
- Photoluminescence Analysis of White-Light-Emitting Si Nanoparticles Using Effective Mass Approximation Method
- Histological and Genetic Characterization of True Hermaphroditism in Korean Pigs
- Microstructural Investigation of SexTe100-x Thin Films Deposited on Si(100) Substrates by X-ray Diffractometer and Transmission Electron Microscopy Analysis
- Shape and Interband Transition Behavior of InAs Quantum Dots Dependent on Number of Stacking Cycles
- Nonlithographic SiO2 Nanodot Arrays via Template Synthesis Approach
- Clinical Feasibility of Interactive Commercial Nintendo Gaming for Chronic Stroke Rehabilitation
- Unexpected double-primary aortoenteric fistula resulting in massive bleeding after induction of anesthesia