Effect of Etch Gas on Dry Etching of Ferroelectric Bi_<3.25>La_<0.75>Ti_3O_<12> Thin Films

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-03-15

著者

• KIM Hye

  Department of Food and Nutrition, Chungnam National University

• SONG Young

  Department of Internal Medicine and AIDS Research Institute, Yonsei University College of Medicine

• Chung Chee

  Department Of Chemical Engineering Inha University

• Song Young

  Department Of Chemical Engineering And Institute Of Clean Technology Inha University

• Chung Chee

  Department Of Chemical Engineering And Institute Of Clean Technology Inha University

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