Low-Temperature Plasma Etching of Copper Films Using Ultraviolet Irradiation

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-11-15

著者

• Choi K‐s

  Korea Advanced Inst. Sci. And Technol.

• CHOI Kang-Sik

  Department of Electrical Engineering, Korea Advanced Institute of Science and Technology

• HAN Chul-Hi

  Department of Electrical Engineering, Korea Advanced Institute of Science and Technology

• Choi Kang-sik

  Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology:lg Semicon C

• Han Chul-hi

  Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology

関連論文

• Low-Temperature Plasma Etching of Copper Films Using Ultraviolet Irradiation
• Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin-Film Transistors
• Suppression of Leakage Current in n-Channel Polysilicon Thin-Film Transistors Using NH_3 Annealing
• Endurance Characteristics and Degradation Mechanism of Polysilicon Thin Film Transistor EEPROMs with Electron Cyclotron Resonance N_2O-Plasma Gate Oxide
• High-Performance EEPROMs Using N- and P-Channel Poly-Si TFTs with ECR N2O-Plasma Oxide
• Effect of Bottom Polysilicon Doping on the Reliability of Interpoly Oxide Grown Using Electron Cyclotron Resonence N_2O-Plasma
• Short Channel Effects in N- and P-Channel Polycrystalline Silicon Thin Film Transistors with Very Thin Electron Cyclotron Resonance N_2O-Plasma Gate Dielectric
• Highly Reliable Interpoly Oxide Using ECR N_2O-Plasma for Next Generation Flash Memory
• Reaction Characteristics between Cu Thin Film and RF Inductively Coupled Cl_2 Plasma without/with UV Irradiation
• Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimensional Photolithography of a Thick Photoresist
• Substrate Resistance Effect on Charge-Pumping Current in Polycrystalline Silicon Thin Film Transistors
• Simultaneous and Accurate Formation of Variously Shaped Holes in Silicon Substrate
• New Fabrication Process of Single-Crystalline Silicon Islands Using Double Diffusion : Application to a Heating Resistor of a Thermal Inkjet Printhead
• Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin-Film Transistors
• Substrate Resistance Effect on Charge-Pumping Current in Polycrystalline Silicon Thin Film Transistors

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