Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimensional Photolithography of a Thick Photoresist
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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Kim Choong-ki
Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology
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HAN Chul-Hi
Department of Electrical Engineering, Korea Advanced Institute of Science and Technology
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YOON Euisik
Department of Electrical Engineering & Computer Science, KAIST
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Yoon Jun-bo
Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology
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Han Chul-hi
Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology
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Yoon Euisik
Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology
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Kim Choong-ki
Department Of Electrical Engineering And Center For Electro-optics Korea Advanced Institute Of Scien
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