Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements

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概要

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• In this letter, we report on thermally driven thin film bulk acoustic resonator (TFBAR) voltage-controlled oscillators (VCOs) integrated with a microheater element. The oscillation frequency of TFBAR VCOs is controlled by applying different power (or bias voltage) to the microheaters implemented on the TFBAR membrane. The TFBARs with the microheater elements are fabricated by Si bulk micromachining technology. The series feedback schematic TFBAR VCO has an oscillation frequency of 3.566 GHz, an output power of $-21$ dBm, and a phase noise of $-110$ dBc/Hz at an offset frequency of 100 kHz. The measured frequency controllability and the measured temperature coefficient of resistance (TCR) of the heater element are 3.19 MHz/V and 0.24%/°C, respectively, with a resistance of 88.1 $\Omega$ at room temperature.

• 2004-01-15

著者

• Lee Heon-min

  Devices & Materials Laboratory Lg Electronics Institute Of Technology

• Park Jae-young

  Device Engineering Team Dongbu Hitek Co. Ltd.

• KIM Hong-Teuk

  Devices & Materials Laboratory, LG Electronics Institute of Technology

• CHOI Hyung-Kyu

  Devices & Materials Laboratory, LG Electronics Institute of Technology

• HONG Hyung-Ki

  Devices & Materials Laboratory, LG Electronics Institute of Technology

• LEE Don-Hee

  Devices & Materials Laboratory, LG Electronics Institute of Technology

• BU Jong-Uk

  Devices & Materials Laboratory, LG Electronics Institute of Technology

• YOON Euisik

  Department of Electrical Engineering & Computer Science, KAIST

• Bu Jong-Uk

  Devices & Materials Laboratory, LG Electronics Institute of Technology, 16 Woomyeon-dong, Secho-gu, Seoul 137-724, Korea

• Yoon Euisik

  Department of Electrical Engineering & Computer Science, KAIST, 373-1 Guseong-dong, Yusong-gu, Daejeon 305-701, Korea

• Choi Hyung-Kyu

  Devices & Materials Laboratory, LG Electronics Institute of Technology, 16 Woomyeon-dong, Secho-gu, Seoul 137-724, Korea

• Hong Hyung-Ki

  Devices & Materials Laboratory, LG Electronics Institute of Technology, 16 Woomyeon-dong, Secho-gu, Seoul 137-724, Korea

• Kim Hong-Teuk

  Devices & Materials Laboratory, LG Electronics Institute of Technology, 16 Woomyeon-dong, Secho-gu, Seoul 137-724, Korea

• Lee Heon-Min

  Devices & Materials Laboratory, LG Electronics Institute of Technology, 16 Woomyeon-dong, Secho-gu, Seoul 137-724, Korea

• Lee Don-Hee

  Devices & Materials Laboratory, LG Electronics Institute of Technology, 16 Woomyeon-dong, Secho-gu, Seoul 137-724, Korea

• Park Jae-Young

  Devices & Materials Laboratory, LG Electronics Institute of Technology, 16 Woomyeon-dong, Secho-gu, Seoul 137-724, Korea

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