A Low Voltage Actuated Microelectromechanical Switch for RF Application
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概要
- 論文の詳細を見る
A push-pull operation is proposed for low voltage actuation of a microelectromechanical (MEM) switch for RF application. The push-pull operation realized by torsion springs and contact electrode height amplification by leverage, lowers the actuation voltage of the MEM switch by reducing the gap between actuation electrodes. The proposed MEM switch is fabricated by gold surface micromachining. Switching operation up to 4 GHz is demonstrated. The actuation voltage is as low as 5 V@. The insertion loss of $\sim 1$ dB and the isolation as high as $\sim 40$ dB at 1 GHz are achieved by the push-pull operation.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-30
著者
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YOON Euisik
Department of Electrical Engineering & Computer Science, KAIST
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Hah Dooyoung
Department Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Te
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Hong Songcheol
Department Of Electrical Engineering And Computer Science (eecs) Korea Advanced Institute Of Science
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Yoon Euisik
Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology (KAIST), 373-1 Kusong-dong, Yusong-gu, Taejon 305-338, Korea
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Hong Songcheol
Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology (KAIST), 373-1 Kusong-dong, Yusong-gu, Taejon 305-338, Korea
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Hah Dooyoung
Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology (KAIST), 373-1 Kusong-dong, Yusong-gu, Taejon 305-338, Korea
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