Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin-Film Transistors
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概要
- 論文の詳細を見る
- 1996-02-01
著者
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Kim Choong-ki
Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology
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HAN Chul-Hi
Department of Electrical Engineering, Korea Advanced Institute of Science and Technology
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HAN Jung-In
Department of Electrical Engineering, Korea Advanced Institute of Science and Technology
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Han J‐i
Korea Electronics Technol. Inst. Kyunggi Kor
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Han C‐h
Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology
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