Short-Channel Effects in N- and P-Channel Polysilicon Thin Film Transistors with Very Thin ECR N_2O-Plasma Gate Dielectrics

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概要

• 論文の詳細を見る
• 1997-09-16

著者

• Lee Jin-Woo

  Dept. of Electrical Eng., Korea Univ.

• Han C‐h

  Department Of Materials Engineering Hanyang University

• Lee J‐w

  Hanyang Univ. Seoul Kor

• Lee J‐w

  Samsung Electronics Co. Ltd. Kyungki‐do Kor

• Lee J‐w

  Technology Development Semiconductor R&d Center Samsung Electronics Co.

• Lee Jin-woo

  Dept. Biotechnology Dong-a Univ.:bk21 Bio-silver Project Of Dong-a Univ.

• Lee Nae-in

  Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology:semiconducto

• LEE Nae-In

  Dept. of E. E., KAIST

• HAN Chul-Hi

  Dept. of E. E., KAIST

• Han C‐h

  Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology

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