ELFIN (ELevated Field INsulator) and SEP (S/D Elevated by Poly-Si Plugging) Process for Ultra-Thin SOI MOSFETs

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概要

• 論文の詳細を見る

• ELFIN (ELevated Field INsulator) process for device isolation and SEP (S/D Elevated by Poly-Si Plugging) process for elevated S/D structure is developed for ultra-thin SOI MOSFETs with SOI film less than 20 nm. With ELFIN, reverse narrow channel effect of NMOSFET is improved by about 50 %, gate leakage current decreased by about 30 %, and hot-carrier immunity increased by about 20 % as compared to that with conventional STI (Shallow-Trench-Isolation) process. With SEP, thick S/D region is obtained even with 20 nm SOI film so that S/D resistance is deceased to a third with excellent uniformity as compared with conventional thin S/D structure because normal thick silicide can be used like bulk devices.

• 社団法人電子情報通信学会の論文
• 2002-06-24

著者

• 黄 俐昭

  Necシリコンシステム研究所

• Lee Jong-wook

  Silicon Systems Research Labs.

• Lee J‐w

  Technology Development Semiconductor R&d Center Samsung Electronics Co.

• 黄 俐昭

  Necマイクロエレクトロニクス研究所

• MOGAMI Tohru

  Silicon Systems Research Laboratories, NEC Corporation

• Mogami T

  Silicon Systems Research Laboratories Nec Corporation

• Mogami T

  Nec Corp. Sagamihara‐shi Jpn

• Mogami Tohru

  Silicon Systems Research Laboratories Nec Corporation

• WAKABAYASHI Hitoshi

  Silicon Systems Research Laboratories, NEC Corporation

• SAITOH Yukisige

  R&D Technical Support Center, NEC Co.

• KOH Risho

  Silicon Systems Research Labs.

• YAMAGAMI Shigeharu

  Silicon Systems Research Labs.

• Wakabayashi Hitoshi

  Silicon Systems Research Laboratories Nec Corporation

• Koh R

  Silicon Systems Research Labs.

• Koh Risho

  Silicon Systems Research Laboratories Nec Corporation

• Koh Risho

  Microelectronics Reserch Laboratory Nec Corp.

• Koh Risho

  Microelectronics Research Laboratories Nec Corporation

• Koh Risho

  Microelectronics Research Labs. Nec Corp.

• Koh Risho

  Silicon Systems Research Laboratory Nec Corporation

• Koh Risho

  Microelectronics Res. Labs. Nec Corp.

• Wakabayashi Hitoshi

  Silicon Systems Research Labs.

• Saitoh Yukisige

  R&d Technical Support Center Nec Co.

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