The Effect of Al/Pt Interface Reaction on Lead-zirconate-titanate Capacitor and the Optimization of Via Contact for Double Metal Ferroelectric RAM
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-03-30
著者
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Lee M‐h
Lg Electronics Inc. Seoul Kor
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Lee J‐w
Hanyang Univ. Seoul Kor
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Kang Nam-soo
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Shin Soo-ho
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Lee J‐w
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Lee J‐w
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Jung Dong-jin
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Hwang Yoo-sang
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Kim K‐n
Frontec Inc. Sendai Jpn
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Kim Ki-nam
Advanced Technology Development Semiconductor R & D Div.
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Lee Jin-woo
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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LEE Sung-Yung
Technology Development, Semiconductor R&D Center, Samsung Electronics Co.
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KOO Bon-Jae
Technology Development, Semiconductor R&D Center, Samsung Electronics Co.
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CHUN Yoon-Soo
Technology Development, Semiconductor R&D Center, Samsung Electronics Co.
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LEE Mi-Hyang
Technology Development, Semiconductor R&D Center, Samsung Electronics Co.
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SHIN Dong-Won
Technology Development, Semiconductor R&D Center, Samsung Electronics Co.
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LEE Sang-Eun
Technology Development, Semiconductor R&D Center, Samsung Electronics Co.
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KIM Byung-Hee
Technology Development, Semiconductor R&D Center, Samsung Electronics Co.
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KIM Ki-Nam
Technology Development, Semiconductor R&D Center, Samsung Electronics Co.
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Koo Bon-jae
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Lee Sung-yung
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Chun Y‐s
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Lee M‐h
Academia Sinica Taipei Twn
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Shin Dong-won
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Kim Byung-hee
Technology Development Semiconductor R&d Center Samsung Electronics Co.
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Kim K‐n
Samsung Electronics Kyungki‐do Kor
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CHUN Yoon-Soo
Technology Development, Semiconductor R&D Center, Samsung Electronics Co.
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