New Crystallization Process of LPCVD a-Si Films below 530℃ Using Metal Adsorption Method
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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Lee Jeong
Department of Obstetrics and Gynaecology, College od Medicine, Soonchunhyang University
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Sohn Dong
Department Of Pharmacy College Of Pharmacy Wonkwang University
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AHN Byung
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
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Ahn B
Korea Advanced Inst. Sci. And Technol. Taejon Kor
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Sohn Dong
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Sohn Dong
R&d Division Lg Semicon. Co. Ltd.
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Sohn D
Applied Materials Korea Chungnam Kor
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Lee Jeong
Department Of Clothing And Textiles Gyeongsang National University
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LEE Bum
Korea Advanced Institute of Science and Technology, Department of Materials Science and Engineering
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Ahn Byung
Department Of Internal Medicine Hepatology Division Kangnam St. Mary's Hospital College Of Medi
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Lee Jeong
Korea Advanced Institute Of Science And Technology Department Of Materials Science And Engineering
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Lee Jeong
Department Of Animal Science And Biotechnology Kyungpook National University
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Lee Jeong
Department Of Anesthesiology And Pain Medicine Yonsei University College Of Medicine
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AHN Byung
Department of Decontamination and Decommissioning, Korea Atomic Energy Research Institute
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