New Crystallization Process of LPCVD a-Si Films below 530℃ Using Metal Adsorption Method

スポンサーリンク

概要

• 論文の詳細を見る
• 1995-08-21

著者

• Lee Jeong

  Department of Obstetrics and Gynaecology, College od Medicine, Soonchunhyang University

• Sohn Dong

  Department Of Pharmacy College Of Pharmacy Wonkwang University

• AHN Byung

  Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology

• Ahn B

  Korea Advanced Inst. Sci. And Technol. Taejon Kor

• Sohn Dong

  Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology

• Sohn Dong

  R&d Division Lg Semicon. Co. Ltd.

• Sohn D

  Applied Materials Korea Chungnam Kor

• Lee Jeong

  Department Of Clothing And Textiles Gyeongsang National University

• LEE Bum

  Korea Advanced Institute of Science and Technology, Department of Materials Science and Engineering

• Ahn Byung

  Department Of Internal Medicine Hepatology Division Kangnam St. Mary's Hospital College Of Medi

• Lee Jeong

  Korea Advanced Institute Of Science And Technology Department Of Materials Science And Engineering

• Lee Jeong

  Department Of Animal Science And Biotechnology Kyungpook National University

• Lee Jeong

  Department Of Anesthesiology And Pain Medicine Yonsei University College Of Medicine

• AHN Byung

  Department of Decontamination and Decommissioning, Korea Atomic Energy Research Institute

関連論文

• IS-84 Contraception in reproductive-aged Korean women(Group11 Women's Health2,International Session)
• A Study on Therlnal Stability of CoSi_2 Elnploying Novel Flne-Gralned PolycryStalline Silicon/CoSi_2/Si (001) System : Semiconductors
• Highly Reliable Dual Gate Oxide Fabrication by Reducing Wet Etching Time and Re-Oxidation for Sub-Quarter Micron CMOS Devices
• Low-Threshold-Current and Single-Mode Surface-Emitting Laser Buried in Amorphous GaAs
• Low Threshold Current Density Surface-Emitting Lasers Buried by Amorphous GaAs
• Study on the Shape Memory Polyamides. Synthesis and Thermomechanical Properties of Polycaprolactone- Polyamide Block Copolymer
• Crystal Structure of a Methine Dye, C.I. Disperse Blue 354
• Crystal Structure of N-tert-Butoxycarbonylbis(2-thioacetoxyethyl)amine
• Crystal Structure of 8-Tosyloxyquinoline
• Crystal Structure of an Anthraquinone Dye, C. I. Disperse Violet 27
• Distribution and Function of the Adrenergic and Cholinergic Receptors in the Fetal Calf Bladder During Mid-Gestational Age
• Effect of Alkoxy Substitution on Photophysical Properties of Poly(p-phenylenevinylene)
• Effect of Wet Etched Thickness and Reoxidation on Reliability of Dual Gate Oxide for Sub-Quarter Micron Complementary Metal-Oxide-Semiconductor Devices
• Decontamination of Building Surface Using Clay Suspension
• Reaction Characteristics between Cu Thin Film and RF Inductively Coupled Cl_2 Plasma without/with UV Irradiation
• Protective Immunity Against Challenge Infection with Trichinella spiralis in the Rat
• Effects of F^+ Implantation on the Characteristics of Poly-Si Films and Low-Temperature n-ch Poly-Si Thin-Film Transistors
• 30-P2-45 Computerized Adverse Drug Reaction (ADR) monitoring system in Kangnam St. Mary's Hospital
• Improvement of Gate Oxide Reliability for Direct Tungsten-Gate Using Denudation of WN_x
• Improvement of Reverse Leakage Current by Fluorine Implantation in n^+/p Shallow Junctions Diffused from a Cobalt Silicide Layer
• Polarization Properties of Vertical-Cavity Surface-Emitting Lasers with Various Patterns in Tilted Pillar Structures
• Cancer screening using ^F-FDG PET/CT in Korean asymptomatic volunteers : a preliminary report
• 5-Hydroxytryptophan Acts on the Mitogen-Activated Protein Kinase Extracellular-Signal Regulated Protein Kinase Pathway to Modulate Cyclooxygenase-2 and Inducible Nitric Oxide Synthase Expression in RAW 264.7 Cells(Biochemistry)
• The Anti-inflammatory and Anti-nociceptive Effects of Ethyl Acetate Fraction of Cynanchi Paniculati Radix(Pharmacognosy)
• Influence of the Microstructure on the Ultrasonic Backscattered Energy from a Liquid/Solid Interface at the Rayleigh Angle
• Effect of ECAP Strain on Deformation Behavior at Low Temperature Superplastic Regime of Ultrafine Grained 5083 Al Alloy Fabricated by ECAP
• Homogeneous Nucleation of Misfit Dislocations in Strained Layers
• Crystal Structure and B-Site Ordering in Antiferroelectric Pb(Mg_W_)O_3, Pb(Co_W_)O_3 and Pb(Yb_Nb_)O_3
• Anti-obesity Effect of Dioscorea nipponica Makino with Lipase-inhibitory Activity in Rodents(Food & Nutrition Science)
• Suppression of Arsenic Loss by Phosphorus Co-Implantation in n^+/p Shallow Junction Diffused from a CoSi_2 Layer
• Reduction of junction leakage current and sheet resistance using C-49 TiSi_2 as a diffusion source
• Reduction of junction leakage current and sheet resistance using C-49 TiSi_2 as a diffusion source
• Formation of Low-Resistivity Gate Electrode Suitable for the Future Devices Using Clustered DCS-Wsix Polycide
• Epitaxial Growth of GaN on LaAlO_3(100) Substrate by RF Plasma Assisted Molecular Beam Epitaxy
• Molecular Authentication of 21 Korean Artemisia Species (Compositae) by Polymerase Chain Reaction-Restriction Fragment Length Polymorphism Based on trnL–F Region of Chloroplast DNA
• Antifibrotic Effects of the Methanol Extract of Polygonum aviculare in Fibrotic Rats Insuced by Bile Duct Ligation and Scission
• Antifibrotic Effects of a Polysaccharide Extracted from Ganoderma lucidum, Glycyrrhizin, and Pentoxifylline in Rats with Cirrhosis Induced by Biliary Obstruction
• Design of a Mutated Adder and Its Optimization Using ILP Formulation(Digital Circuits and Computer Arithmetic, Recent Advances in Circuits and Systems-Part 1)
• Low Latency Four-Flop Synchronizer with the Handshake Interface(Communications and Wireless Systems, Recent Advances in Circuits and Systems-Part 1)
• A Low Latency Asynchronous FIFO Combining a Wave Pipeline with a Handshake Scheme(VLSI Design Technology and CAD)
• Asynchronous Multiple-Issue On-Chip Bus with In-Order/Out-of-Order Completion(Integrated Electronics)
• Differential Value Encoding for Delay Insensitive Handshake Protocol(Communications and Wireless Systems, Recent Advances in Circuits and Systems-Part 1)
• Interfacial Reaction between Aluminum Metal and Boron-Doped Polysilicon in a Planar Type Antifuse Device
• Al-Induced Crystallization of an Amorphous Si Thin Film in a Polycrystalline Al/Native SiO_2/Amorphous Si Structure
• A New Low-Resistance Antifuse with Planar Metal/Dielectric/Poly-Si/Dielectric/Metal Structure
• A New Low-Resistance Antifuse with Planar Metal/Dielectric/Poly-Si/Dielectric/Metal Structure
• Novel keratin 5 mutations in epidermolysis bullosa simplex : Cases with unusual genotype-phenotype correlation
• Keratin 17 mutation in pachyonychia congenita type 2 patient with early onset steatocystoma multiplex and Hutchinson-like tooth deformity
• Microstructure and Electrical Properties of Tantalum Oxide Thin Film Prepared by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition
• Ectopic Expression of a Foreign Aquaporin Disrupts the Natural Expression Patterns of Endogenous Aquaporin Genes and Alters Plant Responses to Different Stress Conditions
• Maternal steroid enhancement of fetal rabbit gastrointestinal motility
• A Case of Mucinous Cystadenocarcinoma of the Appendix : Difficult Preoperative Differentiation from an Ovarian Tumor
• Antimalarial Activity of Lavandulyl Flavanones Isolated from the Roots of Sophora flavescens (Pharmacognosy)
• P3-IS-69 Comparison of Laparoscopically Assisted Vaginal Hysterectomy (LAVH) with Total Abdominal Hysterectomy (TAH)(Group93 Reproduction3,International Session)
• P3-IS-36 Clinical analysis of Non-blood transfusion treatment in patients who refused a blood transfusion for Obstetrical Part(Group89 Perinatology+Women's Health1,International Session)
• 15-27.Study on the Factor V Leiden Mutation in Pregnant Women and Relationship with Preeclampsia Severe Form (Session 17 Perinatology 6)
• 14-12.The study of comparison of first and second trimester screening for fetal anomalies (Session 15 Perinatology 4)
• Prerequisite for Photoluminescence D Line Spectra of Heat-Treated Carbon-Lean Czochralski Silicon Crystals
• Low-Temperature Crystallization of Amorphous Si Films by Metal Adsorption and Diffusion
• New Crystallization Process of LPCVD a-Si Films below 530℃ Using Metal Adsorption Method
• Novel and recurrent mutations in Keratin 5 and 14 in Korean patients with Epidermolysis bullosa simplex
• The Effect of Stress on Solid-Phase Epitaxial RegroWth in As^+ -Implanted Two-Dimensional Amorphized Si : Semiconductors
• Formation and Properties of Epitaxial CoSi_2 Layers on p-Si_Ge_/p-Si(001) using a Si Capping Layer by Metal-Organic Chemical Vapor Deposition
• Effects of Annealing Conditions on the Crystallization and Grain Growth of Metastable Ge_2Sb_2Te_5
• Adenomyoma of the small intestine : Report of two cases and review of the literature
• Usefulness of a malleable penile prosthesis in patients with a spinal cord injury
• Effect of Deposition Temperature on the Crystallization Mechanism of Amorphous Silicon Films on Glass
• Advancement in HCC imaging : diagnosis, staging and treatment efficacy assessments : Imaging diagnosis and staging of hepatocellular carcinoma
• Microsatellite instability and mutations of E2F-4 in hepatocellular carcinoma from Korea
• Antibacterial and synergistic effects of Smallanthus sonchifolius leaf extracts against methicillin-resistant Staphylococcus aureus under light intensity
• Tolterodine : As effective but better tolerated than oxybutynin in Asian patients with symptoms of overactive bladder
• Inhibition of ganglioside GD1a synthesis suppresses the differentiation of human mesenchymal stem cells into osteoblasts
• Observation of CuPt-Type Ordered Structure in CdZnTe during Organometallic Vapor Phase Epitaxial Growth
• Identification of a Cryptic N-Terminal Signal in Saccharomyces cerevisiae Peroxisomal Citrate Synthase That Functions in Both Peroxisomal and Mitochondrial Targeting^1
• Surface Morphologies of BaTiO_3 Thin Films by Atomic Force Mieroscopy
• The mechanism of action of sanguinarine against methicillin-resistant Staphylococcus aureus
• Quantitative evaluations of a high-voltage multiscan CCD camera
• Mutational and Functional Analysis of the Cryptic N-Terminal Targeting Signal for Both Mitochondria and Peroxisomes in Yeast Peroxisomal Citrate Synthase Cit2p
• The comparison of ^I whole-body scans on the third and tenth day after ^I therapy in patients with well-differentiated thyroid cancer : preliminary report
• Characterization of Low-Temperature Stress Hump in Relation to Phase Formation Sequence of Nickel Silicide
• Comparative Studies on the Ontogeny and Autonomic Responses of the Fetal Calf Bladder at Different Stages of Development : Involvement of the Nitric Oxide on Field Stimulated Relaxation
• Synergistic effect of tetrandrine and ethidium bromide against methicillin-resistant Staphylococcus aureus (MRSA)
• Do Escherichia coli extract and cranberry exert preventive effects on chronic bacterial prostatitis? Pilot study using an animal model
• Effect of Hydroxyethyl Starch 130/0.4 on Blood Loss and Coagulation in Patients With Recent Exposure to Dual Antiplatelet Therapy Undergoing Off-Pump Coronary Artery Bypass Graft Surgery
• Association between bone mineral density and metabolic syndrome in pre- and postmenopausal women
• Determination of L-Ascorbate by Electrocatalytic Oxidation on 1, 5, 8, 12-Tetraaza-2, 4, 9, 11-tetramethylcyclotetradecinatonickel(II) Polymer Modified Glassy Carbon Electrode
• Transmission Electron Microscopy Study on the Crystallization of Sb–Se–Te Ternary Alloys
• Orbital Lymphangioma Treated by Lateral Wall Decompression and Fat Removal
• Improvement in Thermal Stability of Chemical Vapor Deposition CoSi2/Polycrystalline Silicon Using TiN and Amorphous Silicon Interlayers
• Formation and Properties of Epitaxial CoSi2 Layers on p-Si0.83Ge0.17/p-Si(001) using a Si Capping Layer by Metal-Organic Chemical Vapor Deposition
• Enhanced Performance of a Polymer Solar Cell upon Addition of Free-Standing, Freshly Etched, Photoluminescent Silicon Nanocrystals
• Lung injury induced by the pulmonary instillation of povidone-iodine in rats
• Metabolism of Ginsenoside Rb1 by Human Intestinal Microflora and Cloning of Its Metabolizing β-D-Glucosidase from Bifidobacterium longum H-1
• Fast Myoglobin Detection Using Nanofluidic Electrokinetic Trapping Technique
• Microstructural Investigation of SexTe100-x Thin Films Deposited on Si(100) Substrates by X-ray Diffractometer and Transmission Electron Microscopy Analysis
• Preventive effect of ginsenoid on chronic bacterial prostatitis
• Effects of Annealing Conditions on the Crystallization and Grain Growth of Metastable Ge2Sb2Te5
• Low-Threshold-Current and Single-Mode Surface-Emitting Laser Buried in Amorphous GaAs
• Modification of Silicon Optical Properties by 250 keV Electron Irradiation
• Altered Patterns of Gene Expression in Response to Chronic Atrial Fibrillation

もっと見る 閉じる

スポンサーリンク