Vertical Magnetic Field Applied LEC Apparatus for Large Diameter GaAs Single Crystal Growth
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概要
- 論文の詳細を見る
A new vertical magnetic field applied LEC apparatus has been developed for volume production of large size GaAs single crystals. The apparatus consists of a superconducting magnet with compact refrigerator systems and an in-house modified high pressure puller. Temperature fluctuation through the molten GaAs was suppressed to less than 0.3℃ by the application of more than 1000 Oe. The vertical magnetic field effects on GaAs melt are described in comparison with the results of a transverse magnetic field.
- 社団法人応用物理学会の論文
- 1984-05-20
著者
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Fukuda Tsuguo
Optoelectronics Joint Research Laboratory
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TERASHIMA Kazutaka
Optoelectronics Joint Research Laboratory
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Katsumata T
Department Of Applied Chemistry Toyo University
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ORITO Fumio
Optoelectronics Joint Research Laboratory
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Terashima K
Nec Corp. Kanagawa Jpn
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KATSUMATA Tooru
Optoelectronics Joint-Research Laboratory
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KATSUMATA Tooru
Optoelectronics Joint Research Laboratory
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