Photoluminescence of Low-Energy B± Implanted Silicon under Ultraviolet Light Excitation
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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Tajima M
Inst. Space And Astronautical Sci. Sagamihara Jpn
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Tajima Michio
Optoelectronics Joint Research Laboratory
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Tajima Michio
Institute Of Space And Astronautical Scienc
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Terashima K
Nec Corp. Kanagawa Jpn
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Miyoshi K
Ulsi Device Development Laboratory Nec Corporation
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TERASHIMA Koichi
ULSI Device Development Laboratory, NEC Corporation
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MIYOSHI Kousuke
ULSI Device Development Laboratory, NEC Corporation
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Tajima Michio
Department Of Electronic Engineering Faculty Of Engineering University Of Tokyo:(present Address) El
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Terashima Koichi
Ulsi Device Development Laboratory Nec Corporation
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