Characterization of HF-Treated Si Surfaces by Photoluminescence Spectroscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-09-01
著者
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TAJIMA Michio
Institute of Space and Astronautical Science/JAXA
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Hattori Tadashi
Research Laboratories, Nippondenso Co., Ltd.
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YAO Takafumi
Department of Physics, Faculty of Science Tohoku University
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Tajima Michio
Institute Of Space And Astronautical Scienc
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Yao Takafumi
Department Of Electrical Engineering Hiroshima University
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Hattori Tadashi
Research Laboratories Denso Corporation
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OHSHIMA Hisayoshi
Research Laboratories, Nippondenso Co., Ltd.
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KONISHI Tomohiro
Department of Electrical Engineering, Hiroshima University
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Konishi Tomohiro
Department Of Advanced Materials Science And Engineering Faculty Of Engineering Yamaguchi University
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Konishi Tomohiro
Department Of Electrical Engineering Hiroshima University
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ITO Hiroyasu
Research Laboratories Nippondenso Co., Ltd.
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Ohshima Hisayoshi
Research Laboratories Nippondenso Co. Ltd.
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Ito Hiroyasu
Research Laboratories Nippondenso Co. Ltd.
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HATTORI TADASHI
Research Center for Advanced Waste and Emission Management, Nagoya University
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HATTORI Tadashi
Research Laboratories Nippondenso Co., Ltd.
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