Scanning Capacitace Microscope/Atomic Force Microscope/Scanning Tunneling Microscope Study of Ion-Implanted Silicon Surfaces
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-06-30
著者
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IWATSUKI Masashi
JEOL Ltd.
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YOSHIMURA Masamichi
Department of Electrical Engineering, Hiroshima University
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YAO Takafumi
Institute for Materials Research, Tohoku University
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Yao Takafumi
Department Of Electrical Engineering Hiroshima University
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Yao Takafumi
Institute For Materials Research Tohoku University
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吉村 昌弘
Division Of Electric Electronic And Information Engineering Graduate School Of Engineering Osaka Uni
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TOMIYE Hideto
Department of Electric Engineering, Hiroshima University
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KAWAMI Hiroshi
Nissin Electric Co., Ltd.
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IZAWA Michiyoshi
Department of Electric Engineering, Hiroshima University
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Tomiye Hideto
Department Of Electric Engineering Hiroshima University
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Kawami Hiroshi
Nissin Electric Co. Ltd.
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Izawa M
Kek Ibaraki Jpn
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Iwatsuki M
Jeol Ltd.
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Yoshimura Masamichi
Department Of Applied Physics The University Of Tokyo:(present Address) Department Of Electrical Eng
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Yao Takafumi
Institute For Interdisciplinary Research Tohoku University
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