Solid-Phase Reactions in Al Alloy/TiN/Ti/Si Systems Observed by In Situ Cross-Sectional TEM
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-02-28
著者
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Hattori Tadashi
Research Laboratories, Nippondenso Co., Ltd.
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Hattori Tadashi
Research Laboratories Denso Corporation
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Ueno Yoshiki
Research Laboratories Nippondenso Co. Ltd.
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Sobue Susumu
Research Laboratories, Nippondenso Co., Ltd.
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Mukainakano Shinichi
Research Laboratories, Nippondenso Co., Ltd.
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Sobue Susumu
Research Laboratories Nippondenso Co. Ltd.
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Mukainakano Shinichi
Research Laboratories Denso Corporation
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HATTORI TADASHI
Research Center for Advanced Waste and Emission Management, Nagoya University
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