Performance Improvement of InGaAsN/GaAs Quantum Well Lasers by Using Trimethylantimony Preflow

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概要

• 論文の詳細を見る

• The performance characteristics of InGaAsN quantum well (QW) lasers with and without trimethylantimony (TMSb) preflow have been studied. The TMSb preflow before the growth of InGaAsN QWs can suppress the Al-contamination effect and decrease the threshold current density compared with conventional InGaAsN QW lasers without preflow. The photoluminescence (PL) intensity increased and linewidth decreased when TMSb flow rate increased. According to the atomic force microscopy (AFM) measurement, the surface roughness was also reduced significantly after TMSb treatment which manifested that the preflow prevented the Al and N precursors from reacting with each other and resulted in a higher optical quality in InGaAsN QWs.

• 2011-01-25

著者

• SU Yan-Kuin

  Institute of Microelectronics & Department of Electrical Engineering National Cheng Kung University

• Chen Wei-cheng

  Institute Of Microelectronics And Advanced Optoelectronic Technology Center National Cheng Kung Univ

• Su Ke-hua

  Institute Of Microelectronics Department Of Electrical Engineering And Advanced Optoelectronic Techn

• Su Yan-kuin

  Institute Of Microelectronics Department Of Electrical Engineering And Advanced Optoelectronic Techn

• Yu Hsin‐chieh

  National Cheng Kung Univ. Tainan Twn

• Yu Hsin-chieh

  Institute Of Microelectronics Department Of Electrical Engineering And Advanced Optoelectronic Techn

• Huang Chun-yuan

  Department Of Applied Science National Taitung University

• Hsu Wei-chou

  Institute Of Microelectronics Department Of Electrical Engineering And Advanced Optoelectronic Techn

• Chen Wei-cheng

  Institute Of Microelectronics Department Of Electrical Engineering And Advanced Optoelectronic Techn

• Wan Cheng-Tien

  Institute of Microelectronics, Department of Electrical Engineering, and Advanced Optoelectronic Tec

• Su Yan-kuin

  Institute Of Electro-optical Science And Engineering Advance Optoelectronics Technology Center Natio

• Wan Cheng-tien

  Institute Of Microelectronics Department Of Electrical Engineering And Advanced Optoelectronic Techn

• Su Yan-kuin

  Institute Of Microelectronics Department Of Electrical Engineering And Advanced Optoelectronic Techn

• Yu Hsin-chieh

  Institute Of Microelectronics And Department Of Electrical Engineering National Cheng Kung University

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