Growth, Electrical Characterization, and Electroluminescence of GaN/SiC Heterojunction Diodes and Bipolar Transistors Fabricated on SiC Off-Axis Substrates

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概要

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• The growth, electrical characterization, and electroluminescence (EL) of GaN/SiC heterojunction bipolar transistors (HBTs) are presented. GaN grown on off-axis SiC by molecular beam epitaxy showed step bunching owing to the large off-angle of SiC substrates, which contributed to the annihilation of edge dislocations. We investigated the impact of base doping concentration and SiC polytype (4H and 6H) on the characteristics of GaN/SiC heterojunction diodes. By utilizing a reduced doping concentration of 1\times 10^{18} cm^-3instead of 1\times 10^{19} cm^-3, we suppressed the tunneling current via interface traps, resulting in an improved rectifying behavior in the diodes. Capacitance--voltage (C--V) and EL characteristics revealed that the band lineup of GaN/SiC is of type II, and 6H-SiC is better for electron injection. In accordance with diode characteristics, the fabricated GaN/SiC HBTs showed an improved common-base current gain of 0.03 by employing a reduced base doping concentration of 1\times 10^{18} cm^-3and 6H-SiC, whereas a current gain below 1\times 10^{-4} was obtained in the HBTs with a base doping concentration of 1\times 10^{19} cm^-3.

• 2013-12-25

著者

• Suda Jun

  Department Of Electrical Engineering Kushiro National College Of Technology

• Kimoto Tsunenobu

  Department Of Electrical Engineering Faculty Of Engineering Kyoto University

• Miyake Hiroki

  Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan

• Amari Koichi

  Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan

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