Effect of Gate–Drain Spacing for In0.52Al0.48As/In0.53Ga0.47As High Electron Mobility Transistors Studied by Monte Carlo Simulations
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概要
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We performed two-dimensional Monte Carlo (MC) simulations of 60-nm-gate InP-based lattice-matched In0.52Al0.48As/In0.53Ga0.47As high electron mobility transistors (HEMTs) to clarify the effect of the gate–drain spacing $L_{\text{gd}}$ on device performance. The calculated maximum transconductance $g_{\text{m}}$ and cutoff frequency $ f_{\text{T}}$ increase with decreasing $L_{\text{gd}}$ down to 50 nm, which agrees with experimental values. To explain the increase in $g_{\text{m}}$ and $ f_{\text{T}}$, we obtained electron velocity profiles in the InGaAs channel layer. Electron velocity overshoot under the gate is enhanced with decreasing $L_{\text{gd}}$. The resulting average electron velocity under the gate increases with decreasing $L_{\text{gd}}$. The enhancement of the electron velocity overshoot can be explained by using potential profiles in the HEMT. Potential profile under the gate in the InGaAs channel becomes steeper with decreasing $L_{\text{gd}}$.
- 2010-01-25
著者
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ENDOH Akira
Fujitsu Laboratories Ltd.
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Awano Yuji
Fujitsu Lab. Ltd. Kanagawa Jpn
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MIMURA Takashi
Fujitsu Laboratories Lid.
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SHINOHARA Keisuke
National Institute of Info. & Com. Tech.
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MATSUI Toshiaki
National Institute of Info. & Com. Tech.
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HIKOSAKA Kohki
Fujitsu Laboratories Ltd.
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Awano Yuji
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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