High Off-state Breakdown Voltage 60-nm-Long-Gate AlGaN/GaN Heterostructure Field-Effect Transistors with AlGaN Back-Barrier
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概要
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We fabricated 60-nm-long-gate AlGaN/GaN heterostructure field-effect transistors (HFETs) with an AlGaN back-barrier structure and investigated the high frequency device characteristics and three-terminal off-state breakdown characteristics as a function of the source-to-drain distance. These devices, with source-to-drain distances of 2 to 5 μm, showed very high current-gain cutoff frequencies of more than 118 GHz. The off-state breakdown characteristics were largely dependent on the source-to-drain distance compared to the high frequency device characteristics, and the devices with source-to-drain distances of 4 and 5 μm exhibited very high off-state breakdown voltages of more than 110 V while keeping very high cutoff frequencies. These good breakdown characteristics might be the result of the double-barrier structure (i.e., AlGaN/GaN/AlGaN), which prevents electron spillover to the AlGaN back-barrier at high power conditions.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-09-25
著者
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MATSUI Toshiaki
National Institute of Info. & Com. Tech.
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Hirose Nobumitsu
National Inst. Of Information And Communications Technology
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MIMURA Takashi
National Institute of Information and Communications Technology
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Mimura Takashi
National Institute of Information and Communications Technology (NICT), Koganei, Tokyo 184-8795, Japan
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Onojima Norio
National Institute of Information and Communications Technology (NICT), Koganei, Tokyo 184-8795, Japan
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ONOJIMA Norio
National Institute of Information and Communications Technology (NICT)
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Matsui Toshiaki
National Institute of Information and Communications Technology (NICT), Koganei, Tokyo 184-8795, Japan
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