InAs Thin-Channel High-Electron-Mobility Transistors with Very High Current-Gain Cutoff Frequency for Emerging Submillimeter-Wave Applications
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概要
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60 nm InAs high-electron-mobility transistors (HEMTs) with a thin channel, a thin InAlAs barrier layer, and a very high gate stem structure have been fabricated and characterized. The thickness of the channel, as well as that of the InAlAs barrier layer, was reduced to 5 nm. A stem height of 250 nm with a Pt-buried gate was used in the device configuration to reduce the parasitics. A high DC transconductance of 2114 mS/mm and a current-gain cutoff frequency (f_{\text{T}}) of 710 GHz were achieved at V_{\text{DS}}=0.5 V.
- 2013-03-25
著者
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Chang Edward-yi
Department Of Materials Science And Engineering And Microelectronics And Information System Research
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Miyamoto Yasuyuki
Department Of Electrical And Electronic Engineering
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Kuo Chien-i
Department Of Materials Science And Engineering National Chiao-tung University
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Chiang Che-yang
Department Of Communications Engineering Yuan Ze University
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Hsu Heng-Tung
Department of Communications Engineering and Communication Research Center, Yuan Ze University, Chunli 320, Taiwan
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Chiang Che-Yang
Department of Communications Engineering, Yuan Ze University, Chungli 32003, Taiwan, R.O.C.
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Hsu Heng-Tung
Department of Communications Engineering, Yuan Ze University, Chungli 32003, Taiwan, R.O.C.
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