Characterization of Planar Semipolar Gallium Nitride Films on Spinel Substrates

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概要

• 論文の詳細を見る

• Specular, planar semipolar gallium nitride films were grown by hydride vapor phase epitaxy. This is the first report of high quality semipolar GaN films that could be used for device growth. Planar films of ($10\bar{1}\bar{1}$)GaN have been grown on (100)MgAl2O4 spinel, and planar films of ($10\bar{1}\bar{3}$)GaN have been grown on (110)MgAl2O4 spinel. The in-plane epitaxial relationship for ($10\bar{1}\bar{1}$)GaN on (100) spinel was $[10\bar{1}\bar{2}]_{\text{GaN}} \parallel [011]_{\text{spinel}}$ and $[1\bar{2}10]_{\text{GaN}} \parallel [0\bar{1}1]_{\text{spinel}}$. The in-plane epitaxial relationship for ($10\bar{1}\bar{3}$)GaN on (110) spinel was $[30\bar{3}\bar{2}]_{\text{GaN}} \parallel [001]_{\text{spinel}}$ and $[1\bar{2}10]_{\text{GaN}} \parallel [\bar{1}10]_{\text{spinel}}$.

• Japan Society of Applied Physicsの論文
• 2005-07-10

著者

• Baker Troy

  Materials Department University Of California Santa Barbara

• FINI Paul

  Materiais and Electrical and Computer Engineering, University of Callfornia

• Nakamura Shuji

  Materials Department University Of Cahfornia

• Wu Feng

  Materials Department and NICP ERATO/JST Group, University of California, Santa Barbara, CA 93106, U.S.A.

• Speck James

  Materials Department and Electrical and Computer Engineering Department, University of California, Santa Barbara, CA 93106, U.S.A.

• Fini Paul

  Materials Department, University of California, Santa Barbara, CA 93106, U.S.A.

• Haskell Benjamin

  Materials Department, Electrical and Computer Engineering Department, and NICP/ERATO JST UCSB Group, University of California, Santa Barbara, CA 93106-5050, U.S.A.

• Baker Troy

  Materials Department, University of California, Santa Barbara, CA 93106, U.S.A.

• Wu Feng

  Materials Department and ERATO/JST UCSB Group, University of California, Santa Barbara, CA 93106-5050, U.S.A.

• Haskell Benjamin

  Materials Department and ERATO/JST UCSB Group, University of California, Santa Barbara, CA 93106-5050, U.S.A.

• Speck James

  Materials and Electrical Engineering Departments, University of California, Santa Barbara, CA 93106, U.S.A.

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