Enhancing the Light Extraction Efficiency of Blue Semipolar $(10\bar{1}\bar{1})$ Nitride-Based Light Emitting Diodes through Surface Patterning

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概要

• 論文の詳細を見る

• To enhance light extraction from a blue semipolar $(10\bar{1}\bar{1})$ multiple-quantum-well light emitting diode (LED), surface patterning was performed on the backside of a GaN substrate on which LED epitaxial layers had previously been grown. After circular photoresist etching masks were defined, the surface was patterned with conical features by inductively-coupled plasma (ICP) etching. A substantial increase (100% before packaging and 33% after) in output power was observed in comparison with a reference sample which had a smooth backside at a drive current of 20 mA. Since ICP etching is a non-equilibrium process, this technique can potentially be applied to LEDs grown on nonpolar $m$- or $a$-plane GaN substrates.

• 2009-03-25

著者

• DENBAARS Steven

  Materials Department and Electrical Engineering Department, University of California

• Fujito Kenji

  Optoelectronics Laboratory Mitsubishi Chemical Corporation

• Nakamura Shuji

  Materials Department University Of Cahfornia

• Saito Makoto

  Materials Department and Electrical and Computer Engineering Department, University of California, Santa Barbara, CA 93106, U.S.A.

• PFAFF Nathan

  Materials Department, University of California, Santa Barbara

• Zhong Hong

  Materials Department and Electrical and Computer Engineering Department, University of California, Santa Barbara, CA 93106, U.S.A.

• Tyagi Anurag

  Materials Department and Electrical and Computer Engineering Department, University of California, Santa Barbara, CA 93106, U.S.A.

• Speck James

  Materials Department and Electrical and Computer Engineering Department, University of California, Santa Barbara, CA 93106, U.S.A.

• Fujito Kenji

  Optoelectronic Laboratory, Mitsubishi Chemical Corporation, 1000 Higashi-Mamiana, Ushiku, Ibaraki 300-1295, Japan

• DenBaars Steven

  Materials Department and Electrical and Computer Engineering Department, University of California, Santa Barbara, CA 93106, U.S.A.

• Pfaff Nathan

  Materials Department and Electrical and Computer Engineering Department, University of California, Santa Barbara, CA 93106, U.S.A.

• Speck James

  Materials and Electrical Engineering Departments, University of California, Santa Barbara, CA 93106, U.S.A.

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