Substrate Reactivity and "Controlled Contamination" in Metalorganic Chemical Vapor Deposition of GaN on Sapphire

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概要

• 論文の詳細を見る

• Atomic force microscopy (AFM) and lateral force microscopy (LFM) have been used to study the effect of common substrate surface pretreatments on the metalorganic chemical vapor deposition (MOCVD) of GaN on sapphire. It appears that contaminants play a major role in the surface chemistry and strongly influence the morphology of the treated surfaces. To investigate the role of these contaminants, we have introduced the concept of "controlled contamination" (CC), namely, exposure of the sapphire surfaces to controlled amounts of potential contaminants and investigation of the resulting sapphire morphology. The results showed that sapphire, considered to be a very stable oxide surface, is clearly reactive under typical conditions employed in the high-temperature MOCVD growth of GaN.

• 社団法人応用物理学会の論文
• 1998-09-15

著者

• Speck James

  Materials Department University Of California

• DENBAARS Steven

  Electrical and Computer Engineering Department, University of California

• DENBAARS Steven

  Materials Department and Electrical Engineering Department, University of California

• Speck J

  Univ. California California Usa

• Denbaars Steven

  Jst-erato中村pj:ucsb

• Denbaars Steven

  Materials Department University Of California

• FINI Paul

  Materiais and Electrical and Computer Engineering, University of Callfornia

• Speck James

  Erato/jst Ucsb Group

• Fini P.

  Materiais And Electrical And Computer Engineering University Of Callfornia

• Golan Yuval

  Materials Department University Of California

• Speck James

  Materials Department And Erato/jst Ucsb Group University Of California

• SPECK J.

  Materials Department, University of California, Santa Barbara

• Speck James

  Materials Department and Electrical and Computer Engineering Department, University of California, Santa Barbara, CA 93106, U.S.A.

• DenBaars Steven

  Materials Department and Electrical and Computer Engineering Department, University of California, Santa Barbara, CA 93106, U.S.A.

• Speck James

  Materials and Electrical Engineering Departments, University of California, Santa Barbara, CA 93106, U.S.A.

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