Design of Vertical Nonvolatile Memory Device Considering Gate-Induced Barrier Lowering (GIBL)(Session4A: Nonvolatile Memory)

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概要

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• Recently, various 3-D nonvolatile memory (NVM) devices have been researched to improve the degree of integration. NVM device of pillar structure can be considered as a candidate. When this is applied to a NAND flash memory array, one end of the device channel is connected to the bulk silicon. At this time, the current in vertical direction varies depending on the thickness of silicon channel. When the channel is thick, the difference of saturation current levels between on/off states of individual device is more obvious. On the other hand, when the channel is thin, the on/off current increases simultaneously whereas the saturation currents do not differ very much. The reason is that the channel potential barrier seen by drain electrons is lowered by read voltage on the opposite sidewall control gate. This phenomenon that can occur in 3-D structure devices due to proximity can be called gate-induced barrier lowering (GIBL). In this work, the dependence of GIBL on silicon channel thickness is investigated, which will be criteria in the implementation of reliable ultra-small NVM devices.

• 社団法人電子情報通信学会の論文
• 2008-07-02

著者

• LEE Jung

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu

• CHO Seongjae

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu

• PARK Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu

• Park Byung‐gook

  School Of Electrical Engineering Seoul National University

• Lee Gil

  Inter-university Semiconductor Research Center Seoul National University:school Of Electrical Engine

• LEE Jong

  Inter-University Semiconductor Research Center, Seoul National University

• Park Byung-gook

  School Of Electrical Engineering Seoul National University

• Park Byung‐gook

  Seoul National Univ. Seoul Kor

• Park Il

  Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National

• Park Il

  Inter-university Semiconductor Research Center Seoul National University:school Of Electrical Engine

• Lee J

  School Of Electrical Engineering Seoul National University

• Cho Seongjae

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Compu

• Shin Hyungcheol

  Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Sci

• Lee Gil

  Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci

• Lee J

  Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci

• Lee Joung-eob

  Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci

• Park Il

  Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci

• Shin Hyungcheol

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Compu

• Lee Jong

  Inter-university Semiconductor Research Center And School Of Electrical Engineering Seoul National U

• Lee Jong

  Inter-univ. Semicon. Res. Center Seoul Nat. Univ.

• Park Byung-gook

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering Seoul Nat

• Lee Jong

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering Seoul Nat

• Lee Jong

  Inter-university Semiconductor Research Center School Of Electrical Engineering Seoul Nat'l Uni

• Shin Hyungcheol

  Inter-university Semiconductor Research Center (isrc)

• Lee Gil

  Inter-university Semiconductor Research Center (ISRC) and School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-gu, Seoul 151-742, Republic of Korea

• Park Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea

• Park Il

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea

• Lee Jung

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea

• Cho Seongjae

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea

• Park Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and Department of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Republic of Korea

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