Reverse-Order Source/Drain with Double Offset Spacer (RODOS) for Sub-5Onm Low-Power and High-Speed MOSFET Design(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

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概要

• 論文の詳細を見る

• We have proposed RODOS (Reverse-Order source/drain formation with Double Offset Spacer) for low power and high speed. Simulation is done to evaluate its potential. It shows enhanced performance in terms of poly-depletion effect, DC characteristics, gate delay and switching energy. At 50nm channel length, it demonstrates 794μA/μm in on-current, O.lnA/μm in off-current, 65mV/V in DIBL, 80mV/dec in SS, 1.29ps in gate delay, 198GHz in f_T and 0.151fJ in switching energy.

• 社団法人電子情報通信学会の論文
• 2003-06-23

著者

• PARK Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu

• CHOI Woo

  Inter-University Semiconductor Research Center, Seoul National University

• CHOI Byung

  Inter-University Semiconductor Research Center, Seoul National University

• Choi B

  Seoul National Univ. Seoul Kor

• Choi W

  Inter-university Semiconductor Research Center Seoul National University

• Choi Woo

  Inter-university Semiconductor Research Center Seoul National University

• Woo Dong-soo

  Inter-university Semiconductor Research Center Seoul National University

• Lee long

  Inter-university Semiconductor Research Center (ISRC) and School of Electrical Engineering, Seoul Na

• Lee Long

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering Seoul Nat

• Woo Dong-soo

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering Seoul Nat

• Choi Byung

  Inter-university Semiconductor Research Center And School Of Electrical Engineering Seoul National U

• Park Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea

• Choi Woo

  Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University, ENG 420-016, Sillim-dong, Gwank-gu, Seoul 151-722, Korea

• Park Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and Department of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Republic of Korea

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