3-dimensional Terraced NAND (3D TNAND) Flash Memory(Session4A: Nonvolatile Memory)

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概要

• 論文の詳細を見る

• We propose a 3-dimensional terraced NAND flash memory. It has a vertical channel so it is possible to make a long enough channel in 1F^2 size. And it has 3-dimensional structure whose channel is connected vertically along with two stairs. So we can obtain high density as in the stacked array structure, without silicon stacking process. We can make NAND flash memory with 3F^2 cell size. Using SILVACO ATLAS simulation, we study terraced NAND flash memory characteristics such as program, erase, and read. Also, its fabrication method is proposed.

• 社団法人電子情報通信学会の論文
• 2008-07-02

著者

• PARK Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu

• Park Byung‐gook

  School Of Electrical Engineering Seoul National University

• Lee Gil

  Inter-university Semiconductor Research Center Seoul National University:school Of Electrical Engine

• LEE Jong

  Inter-University Semiconductor Research Center, Seoul National University

• Park Byung-gook

  School Of Electrical Engineering Seoul National University

• Lee J

  School Of Electrical Engineering Seoul National University

• Kim Yoon

  Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Sci

• Shin Hyungcheol

  Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Sci

• Kim Yoon

  Inter-university Semiconductor Research Center And School Of Electrical Engineering Seoul National U

• Lee Gil-Seong

  Inter-university Semiconductor Research Center, Seoul National University

• Lee J

  Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci

• Kim Yoon

  Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci

• Lee Gil-seong

  Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci

• Lee Joung-eob

  Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci

• Kim Yoon

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Compu

• Shin Hyungcheol

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Compu

• Lee Jong

  Inter-univ. Semicon. Res. Center Seoul Nat. Univ.

• Lee Jong

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering Seoul Nat

• Lee Jong

  Inter-university Semiconductor Research Center School Of Electrical Engineering Seoul Nat'l Uni

• Kim Yoon

  School Of Electrical Engineering Seoul National University

• Shin Hyungcheol

  Inter-university Semiconductor Research Center (isrc)

• Park Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea

• Park Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and Department of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Republic of Korea

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