Nanoscale Multi-Line Patterning Using Sidewall Structure
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-06-30
著者
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PARK Byung-Gook
Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu
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CHOI Woo
Inter-University Semiconductor Research Center, Seoul National University
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LEE Jong
Inter-University Semiconductor Research Center, Seoul National University
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Choi W
Inter-university Semiconductor Research Center Seoul National University
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Kim D
Seoul National Univ. Seoul Kor
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Choi Woo
Inter-university Semiconductor Research Center Seoul National University
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CHUNG Kyung-Hoon
Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National
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SUNG Suk-Kang
Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National
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KIM Dae
Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National
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LEE Cheon
Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National
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Kang Sangwoo
Seoul National Univ. Seoul Kor
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Lee J
Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci
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Kim D
Inter-university Semiconductor Research Center School Of Electrical Engineering Seoul National Unive
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Kim Dae
Inter-university Semiconductor Research Center School Of Electrical Engineering Seoul National Unive
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Lee Cheon
Inter-university Semiconductor Research Center (isrc) And Semiconductor Materials And Devices Lab. (
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Sim Jae
Inter-university Semiconductor Research Center And School Of Electrical Engineering Seoul National U
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Sung Suk-kang
Inter-university Semiconductor Research Center And School Of Electrical Engineering Seoul National U
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Chung Kyung-hoon
Inter-university Semiconductor Research Center And School Of Electrical Engineering Seoul National U
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Kang Sangwoo
Inter-university Semiconductor Research Center Seoul National University:school Of Electrical Engine
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Lee Jong
Inter-univ. Semicon. Res. Center Seoul Nat. Univ.
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Kang Sangwoo
Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci
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Sugn Suk-Kang
Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National University
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Lee Cheon
Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-gu, Seoul 151-742, Republic of Korea
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Park Byung-Gook
Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea
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Choi Woo
Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University, ENG 420-016, Sillim-dong, Gwank-gu, Seoul 151-722, Korea
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Park Byung-Gook
Inter-University Semiconductor Research Center (ISRC) and Department of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Republic of Korea
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