Accurate Extraction of the Trap Depth from RTS Noise Data by Including Poly Depletion Effect and Surface Potential Variation in MOSFETs(Ultra-Thin Gate Insulators,<Special Section>Fundamentals and Applications of Advanced Semiconductor Devices)
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概要
- 論文の詳細を見る
Accurate extraction of the trap position in the oxide in deep-submicron MOSFET by RTN measurement has been investigated both theoretically and experimentally. The conventional equation based on the ratio of emission time and capture time ignores two effects, that is, the poly gate depletion effect and surface potential variation in strong inversion regime. In this paper, by including both of the two effects, we have derived a new equation which gives us more accurate information of the trap depth from the interface and the trap energy. With experimental result, we compare the trap depth obtained from the new equation and that of the conventional method.
- 社団法人電子情報通信学会の論文
- 2007-05-01
著者
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CHO Seongjae
Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu
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Cho Seongjae
Inter-university Semiconductor Research Center Seoul National University:school Of Electrical Engine
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Shin Hyungcheol
Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Sci
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LEE Hochul
Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Sci
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YOON Youngchang
Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Sci
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Shin Hyungcheol
Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Compu
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Shin Hyungcheol
Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci
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Lee Hochul
Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci
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Yoon Youngchang
Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci
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Shin Hyungcheol
Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering Seoul Nat
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Shin Hyungcheol
Inter-university Semiconductor Research Center (isrc)
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Shin Hyungcheol
Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci
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Cho Seongjae
Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea
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