Extraction of Electron Band Mobility in Amorphous Silicon Thin-Film Transistors
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概要
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In this paper, extraction method of electron band mobility in amorphous silicon thin-film transistor (a-Si TFT) is presented. First, we propose the mobility model considering the traps of amorphous silicon and the vertical field dependent mobility degradation. Then we calculate the ratio of effective mobility to band mobility by considering the traps. After that, the vertical field dependent mobility degradation is applied to the model using fitting parameters. Through this process, 13 cm2 V-1 s-1 of band mobility is extracted in our devices. Experimentally extracted electron band mobility of a-Si TFTs would be useful to technology computer aided design (TCAD) and simulation program with integrated circuit emphasis (SPICE).
- 2012-02-25
著者
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Shin Hyungcheol
Inter-university Semiconductor Research Center (isrc)
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Lee Jaeho
Inter-University Semiconductor Research Center (ISRC), School of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Korea
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Lee Jaehong
Inter-University Semiconductor Research Center (ISRC), School of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Korea
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Jang Seunghyun
Inter-University Semiconductor Research Center (ISRC), School of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Korea
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Jung Keum-Dong
LCD R&D Center, Samsung Electronics Co., Ltd., Yongin, Gyeonggi 446-711, Korea
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Park Mun-Soo
LCD R&D Center, Samsung Electronics Co., Ltd., Yongin, Gyeonggi 446-711, Korea
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Yoo Moon-Hyun
LCD R&D Center, Samsung Electronics Co., Ltd., Yongin, Gyeonggi 446-711, Korea
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Yoo Moon-Hyun
LCD R&D Center, Samsung Electronics Co., Ltd., Yongin, Gyeonggi 446-711, Korea
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Jung Keum-Dong
LCD R&D Center, Samsung Electronics Co., Ltd., Yongin, Gyeonggi 446-711, Korea
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Park Mun-Soo
LCD R&D Center, Samsung Electronics Co., Ltd., Yongin, Gyeonggi 446-711, Korea
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Lee Jaehong
Inter-university Semiconductor Research Center (ISRC) and School of Electrical Engineering, Seoul National University, San 56-1, Sillim-dong, Gwanak-gu, Seoul 151-742, Korea
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