Phosphorous Incorporation in Ultrathin Gate Oxides and Its Impact to the Network Structure
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概要
- 論文の詳細を見る
- 1997-09-16
著者
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HIROSE Masataka
Department of Electrical Engineering, Hiroshima University
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Miyazaki Seiichi
Department Of Electrical Engineering Hiroshima University
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Miyazaki Seiichi
Department Of Electrical Engineering Graduate School Of Advanced Sciences And Matter Hiroshima Unive
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MORINO Kohichi
Department of Electrical Engineering, Hiroshima University
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Morino Kohichi
Department Of Electrical Engineering Hiroshima University
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Hirose Masataka
Department Of Electrical Engineering Faculty Of Engineering Hiroshima University
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