Selective Growth of Polycrystalline Silicon by Laser-Induced Cryogenic CVD : Silicon Devices and Process Technologies(<Special Section>Solid State Devices and Materials 1)

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1988-11-20

著者

• Tanaka Takeshi

  Department Of Cardiology The Heart Institute Of Japan

• Miyazaki Seiichi

  Department Of Electrical Engineering Hiroshima University

• Miyazaki Seiichi

  Department Of Electrical Engineering Graduate School Of Advanced Sciences And Matter Hiroshima Unive

• DEGUCHI Koji

  Department of Electrical Engineering, Hiroshima University

• HIROSE Msataka

  Department of Electrical Engineering, Hiroshima University

• Deguchi Koji

  Department Of Electrical Engineering Hiroshima University

• Hirose Msataka

  Department Of Electrical Engineering Hiroshima University

• Tanaka Takeshi

  Department Of Biomedical Chemistry Graduate School Of Medicine The University Of Tokyo

関連論文

• ESTIMATION OF MITRAL STENOSIS BY USING DIGITAL PERFUSION IMAGES (DPI) : Nuclear Cardiology : PROCEEDINGS OF THE 44th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
• Gene Analysis and Enzymatic Properties of Thermostable β-Glycosidase from Pyrococcus kodakaraensis KODI
• In-situ Measurement of Temperature Variation in Si Wafer During Millisecond Rapid Thermal Annealing Induced by Thermal Plasma Jet Irradiation
• Melting and Solidification of Microcrystalline Si Films Induced by Semiconductor Diode Laser Irradiation
• Application of Plasma Jet Crystallization Technique to Fabrication of Thin-Film Transistor
• Characterization of Interfacial Oxide Layers in Heterostructures of Hafnium Oxides Formed on NH_3-Nitrided Si(100)
• Impact of Rapid Thermal O_2 Anneal on Dielectric Stack Structures of Hafnium Aluminate and Silicon Dioxide Formed on Si(100)
• Long-term follow-up of intraductal papillary adenoma of the pancreas
• THE CHANGE IN BREATHING PATTERN ASSOCIATED WITH PULMONARY HYPERTENTION IN MITRAL STENOSIS : Valvular Heart Disease, Pulmonary Circulation : FREE COMMUNICATIONS (VI) : PROCEEDINGS OF THE 49th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
• PATHOPHYSIOLOGICAL CHANGES IN ALVEOLAR FUNCTION RELATED TO PULMONARY HYPERTENSION AND HIGH PULMONARY VASCULAR RESISTANCE IN MITRAL STENOSIS (2nd REPORT) : Pulmonary Circulation : 46th Annual Scientific Meeting, Japanese Circulation Society
• SMALL AIRWAYS OBSTRUCTION RELATED TO PULMONARY HYPERTENSION IN MITRAL STENOSIS : Pulmonary Circulation, Hemodialysis : PROCEEDINGS OF THE 44th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
• Mitochondrial Dehydrogenases in the Aerobic Respiratory Chain of the Rodent Malaria Parasite Plasmodium yoelii yoelii
• Radical- and Ion-Induced Reactions on Plasma-Deposited Silicon Surfaces
• Growth Kinetics of Silicon Thin Film Studied by Hydrogen Radical and Ion Irradiation : Beam Induced Physics and Chemistry
• Diffusion Barrier Effect of Ultra-Thin Photo-Nitrided a-Si:H Overlayer on SnO_2/Glass Substrate
• Impurity Diffusion Barrier Effect of Ultra-Thin Plasma-Nitrided a-Si:H Overlayer on SnO_2/Glass Substrate
• Electronic Structure of Photochemically Etched Silicon Surfaces : Surfaces, Interfaces and Films
• Diffusion of constituent Atoms in P-type a-Si:H / SnO_2 Interfaces : Surfaces, Interfaces and Films
• Band Offset in Boron-Doped Amorphous Silicon Heterostructures : Electrical Properties of Condensed Matter
• Determination of Band Discontinuity in Amorphous Silicon Heterojunctions : Electrical Properties of Condensed Matter
• Multiple-Step Electron Charging in Silicon-Quantum-Dot Floating Gate Metal-Oxide-Semiconductor Memories
• Carrier Depletion Effect in the n^+Poly-Si Gate Side-Wall/SiO_2 Interfaces as Evaluated by Gate Tunnel Leakage Current : Semiconductors
• Quantitative Analysis of Oxide Voltage and Field Dependence of Time-Dependent Dielectric Soft Breakdown and Hard Breakdown in Ultrathin Gate Oxides
• Experimental Evidence of Carrier Depletion Effect near n^+Poly-Si Gate Side
• Charging States of Si Quantum Dots as Detected by AFM/Kelvin Probe Technique
• Analysis of Tunnel Current through Ultrathin Gate Oxides
• Luminescence Study of Thermally-Oxidized Porous Si under Subgap or Overgap Excitation
• Gap-State Distributions in Hydrogenated Amorphous Silicon-Germanium Evaluated Using Capacitance-Voltage Method
• Optical Absorption and Photoluminescence of Self-Assembled Silicon Quantum Dots
• Surface Morphologies of Hydrogenated Amorphous Silicon at the Early Stages of Plasma-Enhanced Chemical Vapor Deposition
• Atomic Scale Morphology of Hydrogen-Termimated Si(100) Surfaces Studied by Fourier-Transform Infrared Attenuated Total Reflection Spectroscopy and Scanning Probe Microscopies
• Luminescence from Thermally Oxidized Porous Silicon
• Effect of Substrate Bias on Silicon Thin-Film Growth in Plasma-Enhanced Chemical Vapor Deposition at Cryogenic Temperatures
• Nitrogen Incorporation in a-Ge:H Produced in High-Hydrogen-Dilution Plasma
• High Quality a-SiGe:H Alloys Prepared by Nanometer Deposition/H_2 Plasma Annealing Method
• High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
• Single-Chip Integration of Light-Emitting Diode, Waveguide and Micrormirrors
• Fabrication and Evaluation of Three-Dimensional Optically Coupled Common Memory
• Electron Tunneling through Ultrathin Gate Oxide Formed on Hydrogen-Terminated Si(100) Surfaces
• Atomic Scale Flatness of Chemically Cleaned Silicon Surfaces Studied by Infrared Attenuated-Total-Reflection Spectroscopy
• BF^+_2 Ion Implantation into Very-Low-Temperature Si Wafer
• Chemical Stability of HF-Treated Si(111) Surfaces
• The Role of Fluorine Termination in the Chemical Stability of HF-Treated Si Surfaces
• Chemical Bonding Features of Fluorine and Boron in BF^+_2 -Ion-Implanted Si
• In-Depth Profiling of Suboxide Compositions in the SiO_2/Si Interface by Angle-Resolved X-Ray Photoelectron Spectroscopy
• Modeling of Soft Breakdown in Ultrathin Gate Oxides
• Determination of Bandgap and Energy Band Alignment for High-Dielectric-Constant Gate Insulators Using High-Resolution X-ray Photoelectron Spectroscopy
• Analytical Modelling of Quasi-Breakdown of Ultrathin Gate Oxides under Constant Current Stressing
• Quantitative Analysis of Tunneling Current through Ultrathin Gate Oxides
• Reabsorption of Visible Luminescence in Porous Si
• Visible Photoluminescence from Porous Silicon
• Structural Inhomogeneity in Hydrogenated Amorphous Silicon in Relation to Photoelectric Properties and Defect Density
• Deposition of Hydrogenated Amorphous Silicon under Intermittent Substrate Bias
• In Situ Monitoring of Silicon Surfaces During Reactive Ion Etching
• Correlation between Light-Induced Degradation and Structural Inhomogeneities in Hydrogenated Amorphous Silicon Prepared under High-Rate Deposition Conditions
• Calculation of Subband States in a Metal-Oxide-Semiconductor Inversion Layer with a Realistic Potential Profile
• Analytical Modeling of Metal Oxide Semiconductor Inversion-Layer Capacitance
• Quasibound States of Electric Field-Induced Quantum Wells in Silicon Subsurface
• Optically Interconnected Kohonen Net for Pattern Recognition
• High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
• Charging States of Si Quantum Dots as Detected by AFM/Kelvin Probe Technique
• Resonant Tunneling through SiO_2/Si Quantum Dot/SiO_2 Double Barrier Structures
• Fine SiO_2 Pattern Generation by Electron Beam Direct Writing onto Polysiloxene-Based Thin Films and Its Application to Etch Mask
• Real-Timte Monitoring of Surface Reactions during Plasma-Enhanced CVD of Silicon
• Fine SiO_2 Pattern Generation by Excimer Laser-Induced Modification of Polysiloxene-Based Thin Films
• Sub-Half-Micron Silicon Pattern Generation by Electron Beam Direct Writing on Polysilane Films
• Overdensity of X-Ray Sources in the Field of Two Nearby Clusters of Galaxies : XMM-Newton View of A 194 and A 1060
• Amorphous Silicon Superlattice Thin Film Transistors
• New Analytical Modeling for Photoinduced Discharge Characteristics of Photoreceptors
• Selective Growth of Polycrystalline Silicon by Laser-Induced Cryogenic CVD : Silicon Devices and Process Technologies(Solid State Devices and Materials 1)
• Improved Performance of Amorphous Silicon Photoreceptor by Using a Thick Surface Layer with a Graded-Band-Gap Structure : Semiconductors
• Changes of Brain Endothelin Levels and Peripheral Endothelin Receptors by Chronic Cigarette Smoke in Spontaneously Hypertensive Rats
• Conformational Stability of 1,2-Dimethoxyethane in the Gas Phase Studied by Infrared Spectroscopy : Importance of an Intramolecular 1,5-CH…O Interaction
• Effects of genetic defects in the CYP2C19 gene on the N-demethylation of imipramine, and clinical outcome of imipramine therapy
• High-Fluidity Deposition of Silicon by Plasma-Enhanced Chermical Vapor Deposition Using Si_2H_6 or SiH_4
• A New X-Ray Lithographic Technique Using Total Reflection of X-Rays from a Pattern Plate
• Phosphorous Incorporation in Ultrathin Gate Oxides and Its Impact to the Network Structure
• Analysis of Soft Breakdown of 2.6-4.9-nm-Thick Gate Oxides
• SICK SINUS SYNDROME, ESPECIALLY EXPERIMENTAL RESEARCH OF HIGH-RATE RESPONSE GROUP : Arrhythmia・Electrophysiology : PROCEEDINGS OF THE 44th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
• CHOICE OF RAPID-ACTING VASODILATORS (V) ACCORDING TO THE MODE OF ACTION IN PATIENTS WITH ACUTE PULMONARY EDEMA (APE) : PROCEEDINGS OF THE 47th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY : Heart Failure
• Adsorption of Lead(II) Ion on Complexane Types of Chemically Modified Chitosan
• The traditional Japanese medicine Rikkunshito increases the plasma level of ghrelin in humans and mice
• Characteristics and Variability of Vertical Phoria Adaptation in Normal Adults
• Immunomodulatory Effects of Gyokuheifusan on INF-γ/IL-4 (Th1/Th2) Balance in Ovalbumin (OVA)-Induced Asthma Model Mice(Pharmacology)
• SIGNIFICANCE OF THE H-V INTERVAL IN PATIENTS WITH INTRAVENTRICULAR CONDUCTION DEFECTS : Arrhythmia・Electrophysiology : PROCEEDINGS OF THE 44th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
• Glutamic Acid Independent Production of Poly(γ-glutamic acid) by Bacillus subtilis TAM-4
• APPLICATION OF GEOLOGIC INFORMATION TO ISOTHERMAL MAPPING
• Hydrogen Plasma Durability of Chemically Treated SnO_2 Thin Films
• Risk Factors of Hepatocellular Carcinoma in Chronic Hepatitis C and Cirrhosis : Special Reference to Laparoscopic Findings
• Infection with GB virus C in the patients with primary hepatocellular carcinoma in Japan
• Calculation of Band Structures for Perovskite-Type Crystals Using Discrete Variational Xα Method
• Non-Uniform Temperature Distribution in the Galaxy Clusters 2A 0335+096 and Abell 496 Observed by XMM-Newton
• P-211 TOTAL SYNTHESIS AND COMPLETE ASSIGNMENT OF THE STEREOSTRUCTURE OF A CYTOTOXIC BROMOTRITERPENE POLYETHER (+)-AURILOL
• Intra-and Inter-Complex Cross-Linking of Subunits in the Qutnol Oxidase Super-Complex from Thermophilic Bacillus PS3^1
• EVALUATION OF MECHANICAL AND THERMAL PROPERTIES OF CUBIC BORON NITRIDE BY AB-INITIO CALCULATION
• Molecular Dynamics Simulations of Atomic Scale Indentation and Cutting Process with Atomic Force Microscope
• Experimental Study on High Pore Rate Formation and Grinding Performance of Porous Metal Bonded Diamond Wheel
• MICROSTRUCTURAL STUDY OF MECHANICAL AND THERMAL PROPERTIES OF DIAMOND-LIKE CARBON
• Three-Dimensional Molecular Dynamics Simulation of Atomic Scale Precision Processing Using a Pin Tool
• Cool-air, Mist, and Cool-air/Mist Grinding Characteristics of Hardened Steel by CBN Wheel(Superabrasive/new wheel grinding process)

もっと見る 閉じる

スポンサーリンク