Variable RF Inductor on Si CMOS Chip
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概要
- 論文の詳細を見る
We propose a novel variable inductor on a Si complementary metal oxide semiconductor (CMOS) chip, whose inductance is of nH-order, for GHz applications. The inductance value can be varied by moving a metal plate above the inductor. The magnetic flux penetrating the spiral inductor continuously varies depending on the position of the metal plate. The metal plate is slid horizontally using a micro electro mechanical system (MEMS) actuator. We present the measured and simulated results. At 2.45 GHz, the inductance is varied from 6.6 nH to 5.7 nH, i.e., the variable range is 13%. These results show that the effect of parasitic capacitance between the spiral inductor and the metal plate can be ignored. The proposed variable inductor can be applied to RF circuits.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-15
著者
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Onodera Hidetoshi
Department Of Communications And Computer Engineering Graduate School Of Informatics Kyoto Universit
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Masu Kazuya
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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SUGAWARA Hirotaka
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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OKADA Kenichi
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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HOSHINO Hiroaki
Department of Communications and Computer Engineering, Kyoto University
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Yokoyama Yoshisato
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Gomi Shinichiro
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Ito Hiroyuki
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Yokoyama Yoshisato
Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, 226-8503, Japan
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Hoshino Hiroaki
Department of Communications and Computer Engineering, Kyoto University, Kyoto-shi, 606-8501, Japan
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Gomi Shinichiro
Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, 226-8503, Japan
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Onodera Hidetoshi
Department of Communication and Computer Engineering, Graduate School of Informatics, Kyoto University, Kyoto 606-8501, Japan
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Sugawara Hirotaka
Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, 226-8503, Japan
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Ito Hiroyuki
Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, 226-8503, Japan
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