Raman Spectroscopic Characterization of Tetragonal PbZrxTi1-xO3 Thin Films: A Rapid Evaluation Method for $c$-Domain Volume
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概要
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We present the use of Raman spectroscopy as a rapid and convenient evaluation tool for domain distribution of tetragonal PbZrxTi1-xO3 (PZT) thin films. From polarized Raman analyses of epitaxial PZT thin films with various $c$-domain volumes, we found that the intensity of the $A_{1}$(TO) modes linearly scales with the $c$-domain volume. These observations, as well as the quick and nondestructive characteristics of this technique, clearly imply that Raman spectroscopy has enormous potential to quantify the fraction of $c$-domain volumes in a wide range of PZT devices.
- 2005-06-10
著者
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Osada Minoru
Advanced Materials Laboratory National Institute For Materials Science
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Wada Syunshuke
Department Of Electronic And Photonic Systems Engineering Kochi University Of Technology
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Ueno Risako
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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Okamoto Shoji
Department Of Dermatology School Of Medicine Chiba University
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Nishida Ken
Department of Communicating Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Katoda Takashi
Department of Electronic and Photonic System Engineering, Kochi University of Technology, 185 Tosayamada-cho, Kami, Kochi 782-8502, Japan
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Ueno Risako
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Yokohama 226-8502, Japan
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Katoda Takashi
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Tosayamada-cho, Kochi 782-8502, Japan
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