Investigation of Sputtering Damage in SrRuO3 Films Prepared by Sputtering with Raman and X-ray Photoemission Spectroscopies
スポンサーリンク
概要
- 論文の詳細を見る
Sputtering damage of SrRuO3 (SRO) films prepared by RF magnetron sputtering under various growth pressures was investigated by Raman spectroscopy and X-ray photoemission spectroscopy (XPS). Phonon modes that were related to Ru and Sr ions changed and XPS spectra shifted with decreasing growth pressure. These results indicate that Sr ions switched place with Ru ions in SRO films when the SRO films had sputtering damage under low-growth-pressure sputtering condition as determined from Raman spectroscopy and XPS measurement. The antisite ion content increased with decreasing growth pressure. The resistivity of the SRO films also increased with increasing antisite ion content. The dynamics of sputtering damage revealed that the antisite Sr and Ru ions were formed in SRO films.
- 2012-09-25
著者
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SHIMA Hiromi
Department of Applied Physics, Faculty of Science, Tokyo University of Science
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Yamamoto Takashi
Department Of Applied Chemistry Faculty Of Engineering Ehime University
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Kamo Takafumi
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259 Nagatuda, Midori-ku, Yokohama 226-8503, Japan
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Kamo Takafumi
Department of Material Science and Engineering, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Nishide Masamichi
Department of Communicating Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Nishida Ken
Department of Communicating Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Tai Takeshi
Department of Communicating Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Funakubo Hiroshi
Department of Material Science and Engineering, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Katoda Takashi
Department of Electronic and Photonic System Engineering, Kochi University of Technology, 185 Tosayamada-cho, Kami, Kochi 782-8502, Japan
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Katoda Takashi
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Kami, Kochi 782-8502, Japan
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Matsuoka Masashi
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Kami, Kochi 782-8502, Japan
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