Evaluation of Residual Strain and Oxygen Vacancy in Multilayer Ceramic Capacitor Using Laser Raman Spectroscopy
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概要
- 論文の詳細を見る
Micro-Raman spectroscopy was employed to investigate the residual strain and oxygen vacancies of BaTiO3-based multilayer ceramic capacitors (MLCCs) with a Ni internal electrode. Strain was found to accumulate around the internal Ni electrodes layers than at other parts of the MLCCs. In addition, the number of oxygen vacancies near the internal Ni electrode was larger than that at any other parts of the MLCCs. These observations clearly show that Raman spectroscopy is extremely useful for evaluating the residual strain and oxygen vacancies in MLCC devices.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-10-30
著者
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials
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Kishi Hiroshi
General R&d Laboratories Taiyo Yuden Co. Ltd.
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Nishida Ken
Department Of Electronic And Photonic Systems Engineering Kochi University Of Technology
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Katoda Takashi
Department Of Electronic And Photonic Systems Engineering Kochi University Of Technology
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Yamamoto Takashi
Department Of Applied Chemistry Faculty Of Engineering Ehime University
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Takeuchi Hironari
Department of Electronic and Photonic System Engineering, Kochi University of Technology, 185 Tosayamada-cho, Kami, Kochi 782-8502, Japan
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Kishi Hiroshi
General R&D Laboratories, Taiyo Yuden Co., Ltd., Nakamuroda, Haruna, Gunma 370-3347, Japan
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Nishida Ken
Department of Communicating Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Funakubo Hiroshi
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259 Nagatuda, Midori-ku, Yokohama 226-8503, Japan
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Katoda Takashi
Department of Electronic and Photonic System Engineering, Kochi University of Technology, 185 Tosayamada-cho, Kami, Kochi 782-8502, Japan
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