Growth Mechanism of Surface Dots Self-Assembled on InP (311)B Substrate

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概要

• 論文の詳細を見る

• Self-assembled quantum dots (QDs) were fabricated on InP (311)B substrates by only cleaning the substrate surface assisted by atomic hydrogen irradiation. The surface dots were studied by atomic force microscopy (AFM), photoluminescence (PL), and Auger analysis. The surface dots fabricated by only this cleaning process showed size uniformity and high-density features as good as those of In_<0.4>Ga_<0.6>As QDs reported on GaAs (311)B substrates. The PL and Auger measurements revealed that the composition of these surface dots was InAs_xP_<1-x> (x>0.5). We have also fabricated surface dots on InP (100) substrates by this cleaning method. The QDs were formed along the step edges and were lower in density than those on InP (311)B.

• 社団法人応用物理学会の論文
• 1999-07-01

著者

• Kawabe M

  Nikko Materials Co. Ltd. Saitama Jpn

• Kawabe Mitsuo

  Institute Of Materials Science University Of Tsukuba

• Kawabe Mitsuo

  Institute Of Applied Physics University Of Tsukuba

• AKAHANE Kouichi

  Institute of Applied Physics, University of Tsukuba

• OKADA Yoshitaka

  Institute of Applied Physics. University of Tsukuba

• KAWAMURA Takahiro

  Institute of Materials Science, University of Tsukuba

• Okada Y

  Sumitomo Heavy Ind. Ltd. Tokyo Jpn

• Okada Y

  Univ. Tsukuba Ibaraki Jpn

• Okada Y

  Institute Of Applied Physics. University Of Tsukuba

• Okada Yoshitaka

  Institute Of Applied Physics University Of Tsukuba

• Kawamura Tatsuo

  Department Of Electrical Engineering Shibaura Institute Of Technology

• Kawamura T

  Department Of Mathematics And Physics University Of Yamanashi

• Kawabe M

  Institute Of Applied Physics University Of Tsukuba

• Kawamura Takao

  Laboratory Of Plant Physiology Graduate School Of Agriculture Kyoto University:(present Address)sumi

• Okada Yasumasa

  Electrotechnical Laboratory

• Akahane K

  Institute Of Applied Physics University Of Tsukuba

• Kawamura Takahiro

  Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan

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