A New Junction Termination in Power Semiconductor Devices employing Trench

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概要

• 論文の詳細を見る

• We have proposed a new junction termination method by employing a shallow oxide trench in order to decrease the junction termination area without sacrificing the breakdown voltage characteristics of the power semiconductor devices. The proposed trench floating field-limiting ring structure decrease the total junction termination area by reducing the space between field-limiting rings (FLR). Reduced space can be obtained due to reduced lateral diffusion region and lower dielectric constant of the silicon dioxide. Our simulations results show that the total junction termination area is considerably decreased with same breakdown voltage condition. Junction termination area of 600V rated device is decreased by 20% compared with that of the conventional FLR structure.

• 社団法人電子情報通信学会の論文
• 2002-06-24

著者

• Han M‐k

  The Author Is With The School Of Electrical Engineering Seoul National University

• Ha Min-woo

  School Of Electrical Eng. & Computer Science #50 Seoul National University

• Choi Y‐i

  School Of Electrical Eng. & Computer Science #50 Seoul National University

• Han M‐k

  Seoul Nat'l Univ. Seoul Kor

• Han Min-Koo

  School of Electrical Engineering, Seoul National University

• Oh J‐k

  Seoul National Univ. Seoul Kor

• Han Min-koo

  School Of Electrical Engineering And Computer Science #50 Seoul National University

• SEO Kwang-Seok

  School of Electrical Engineering, Seoul National University

• CHOI Yearn-Ik

  College of Electronics Eng., Ajou University

• OH Jae-Keun

  School of Electrical Engineering #50, Seoul National University

• Choi Yearn-ik

  School Of Electrical Eng. & Computer Science #50 Seoul National University

• Oh Jae-keun

  School Of Electrical Eng. #50 Seoul National University

• Seo K‐s

  Seoul Nat'l Univ. Eecs/ee

• Seo Kwang-seok

  School Of Electrical Engineering And Computer Science Seoul National University

• Seo Kwang-seok

  Seoul Nat'l Univ. Eecs/ee

• Choi Young-hwan

  School Of Electrical Eng. Seoul Nat'l Univ.

• Han Min-koo

  School Of Electrical Eng. & Computer Science #50 Seoul National University

• Han Min-Koo

  School of Electrical al Engineering and Computer Science #50, Seoul National University, Seoul 151-742, Korea

• Seo Kwang-Seok

  School of Electrical Engineering #50, Seoul National University, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea

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