A Flip-Chip Assembled Millimeter-Wave Oscillator Stabilized with a Micromachined Cavity on a Thin-Film Substrate
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概要
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A low-cost 47 GHz microwave integrated circuit (MIC) oscillator stabilized with a micromachined cavity is presented using a thin-film substrate with a flip-chip interconnection. A GaAs pseudomorphic high electron-mobility transistor (pHEMT) was flip-chip assembled on the thin-film substrate as an active device to generate negative resistance. A micromachined cavity, which is employed to stabilize a 47-GHz MIC oscillator as a series-feedback element, is fabricated using a low-cost silicon micromachining technique and flip-chip assembled on the thin-film substrate with integrated passives. The fabricated cavity shows an unloaded $Q$-factor of 671 with a resonant frequency of 46.91 GHz. The cavity oscillator developed shows an output power of about 11.5 dBm and a low phase noise of $-95$ dBc/Hz at 1 MHz offset with an oscillation frequency at 47.06 GHz, which is a 17-dB improvement over a free running MIC oscillator. This work demonstrates the great potential of a thin-film substrate with a flip-chip interconnection for a low-cost and high-performance mm-wave system-on-package (SOP) technology.
- 2009-04-25
著者
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Kwon Youngwoo
School of Electrical Engineering and Computer Science, Seoul National University
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Kim Youngmin
School Of Electrical Engineering Hong-ik University
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Seo Kwang-seok
School Of Electrical Engineering And Computer Science Seoul National University
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Song Sangsub
School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Shillim-dong, Kwanak-gu, Seoul, 151-742, Korea
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Song Sangsub
School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Republic of Korea
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Kwon Youngwoo
School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Republic of Korea
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Seo Kwang-Seok
School of Electrical Engineering #50, Seoul National University, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea
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Seo Kwang-Seok
School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Republic of Korea
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Kim Youngmin
School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Republic of Korea
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Kim Youngmin
School of Electrical and Computer Engineering, UNIST (Ulsan National Institute of Science and Technology)
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