Cold- and hot-switching lifetime characterizations of ohmic-contact RF MEMS switches
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概要
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In this paper, to evaluate the applicability of electrostatically-actuated metal to metal direct-contact RF MEMS switches in practical RF fields, we performed three kinds of lifetime tests for the switches using three different conditions: cold-switching with no power, hot-switching with RF power, and hot-switching with DC current loads. The tested MEMS switch was demonstrating stable operation even after 109 cycles when cold-switching with no loads. We also experimentally showed that the tested switches could endure up to 106 cycles with 0.5W of RF power and 108 cycles with 30mA of DC current.
- （社）電子情報通信学会の論文
著者
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Kim Y‐k
School Of Electrical Engineering And Computer Sci. Seoul National Univ.
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Kim Jong-Man
Department of Nanosystem and Nanoprocess Engineering, Pusan National University
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Lee Sanghyo
School of Electrical Engineering and Computer Science, Seoul National University
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Baek Chang-Wook
School of Electrical and Electronics Engineering, Chung-Ang University
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Kwon Youngwoo
School of Electrical Engineering and Computer Science, Seoul National University
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Kim Yong-Kweon
School of Electrical Engineering and Computer Science, Seoul National University
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Kim Jong-man
Department Of Chemical Engineering Colledge Of Engineering Hanyang University
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Kim Yong-kweon
School Of Computer And Electrical Engineering Seoul National University
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