The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors

スポンサーリンク

概要

• 論文の詳細を見る

• The purpose of this study was to explore the vapor-phase (VP) deposition of fluorocarbon (FC) films for the prevention of in-use stiction in a microelectromechanical system (MEMS). Liquid sources (3M Co.'s FC722 and FC40) were used to deposit FC films on sputter coated Al surfaces after wet treatment (73% H3PO4, 4% HNO3, 3.5% CH3COOH, 19.5% deionized water) and O2 and O2/CF4 plasma treatments. A vacuum oven, set at 110°C, was used for the experiment. The deposition was carried out at a pressure of 4.5×10-2 Torr for 40 min followed by the annealing at 300 Torr for 20 min in N2 to obtain the highest water contact angles on Al. The wet treatments of the surfaces resulted in higher contact angles and thicker FC films than those obtained by the plasma treatments. Attenuated total reflectance fourier transform infrared spectroscopy (ATR-FTIR) analysis showed the strong CF2 stretching bands in the 1100–1300 cm-1 region. Atomic force microscopy (AFM) analysis revealed the changes of surface morphology before and after FC deposition. Also no stiction of micromirrors was observed when fluorocarbon films were deposited on them even after 2×108 touch-down cycles.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1998-12-30

著者

• Kwon Myong-jong

  Research Center For Electronic Materials And Components And Department Of Metallurgy And Materials E

• PARK Jin-Goo

  Research Center for Electronic Materials and Components and Department of Metallurgy and Materials E

• LEE Kang-Kuk

  Research Center for Electronic Materials and Components and Department of Metallurgy and Materials E

• Kim Yong-kweon

  School Of Computer And Electrical Engineering Seoul National University

• Shin Hyung-jae

  Core Technology Research Center Samsung Electronics Co. Ltd.

• Lee Sang-ho

  Research Associate Department Of Precision Mechanical Engineering Hanyang University

• Lee Kang-Kuk

  Research Center for Electronic Materials and Components and Department of Metallurgy and Materials Engineering,

• Park Jin-Goo

  Research Center for Electronic Materials and Components and Department of Metallurgy and Materials Engineering,

• Lee Sang-Ho

  Research Center for Electronic Materials and Components and Department of Metallurgy and Materials Engineering,

関連論文

• Cold- and hot-switching lifetime characterizations of ohmic-contact RF MEMS switches
• The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors
• Anisotropic Bulk Etching of (110) Silicon with High Aspect Ratio
• Silver Nanoparticle-Embedded Platforms for High Throughput Screening of Proteins
• Fabrication and Experiment of Novel Type Electrohydrodynamic Micropump
• 陽極接合を用いるマイクロXY-ステイジの設計と製作
• 電磁力で駆動する45度可動マイクロミラーの製作と實驗
• Four-Wheel Independent Steering(4WIS)System for Vehicle Handling Improvement by Active Rear Toe Control
• Surface-Enhanced Raman Spectroscopic Encoded Magnetic Beads for Multiplex Protein Analyses
• Design and Fabrication of Electromagnetic Micromirror with Bulk Silicon Mirror Plate and Aluminum Spring
• Effect of 12-week Swiss Ball Exercise Program on Physical Fitness and Balance Ability of Elderly Women
• Fabrication and Experiment of Planar Micro Ion Drag Pump
• The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors

もっと見る 閉じる

スポンサーリンク