Anisotropic Bulk Etching of (110) Silicon with High Aspect Ratio

スポンサーリンク

概要

• 論文の詳細を見る
• 電気学会の論文

著者

• Kim Y‐k

  Seoul National Univ. Seoul Kor

• KIM Seong-Hyok

  School of Electrical Engineering, Seoul National University

• LEE Sang-Hun

  Department of Electrical Engineering, Dankook University

• Kim Yong-kweon

  School Of Computer And Electrical Engineering Seoul National University

• Lee Sang-hun

  Department Of Biology Inha University

• Lee Seung-ki

  Department Of Electrial Engineering Dankook University

• Kim Seong-hyok

  School Of Electrical Engineering Seoul National University

• Lee S‐k

  Department Of Electrical Engineering Dankook University

• Lim Hyung-Taek

  School of Electrical Engineering, Seoul National University

関連論文

• Cold- and hot-switching lifetime characterizations of ohmic-contact RF MEMS switches
• The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors
• Anisotropic Bulk Etching of (110) Silicon with High Aspect Ratio
• Silver Nanoparticle-Embedded Platforms for High Throughput Screening of Proteins
• A Novel Micromachining Technique to Fabricate Released GaAs Microstructures with a Rectangular Cross Section
• Fabrication and Experiment of Novel Type Electrohydrodynamic Micropump
• Effects of Acupuncture at GV01 on Experimentally Induced Colitis in Rats : Possible Involvement of the Opioid System
• 陽極接合を用いるマイクロXY-ステイジの設計と製作
• 電磁力で駆動する45度可動マイクロミラーの製作と實驗
• IS-42 The Cause of Amenorrhea for adolescent and premarital women(Group5 Reproduction3,International Session)
• Surface-Enhanced Raman Spectroscopic Encoded Magnetic Beads for Multiplex Protein Analyses
• Reduction of Electrically Evoked Neural Activity by Ginseng Saponin in Rat Hippocampal Slices
• Clinical Outcomes of 3 Fusion Methods Through the Posterior Approach in the Lumbar Spine
• Significance of Chin-Brow Vertical Angle in Correction of Kyphotic Deformity of Ankylosing Spondylitis Patients
• Asymptomatic Cervical Cord Compression in Lumbar Spinal Stenosis Patients : A Whole Spine Magnetic Resonance Imaging Study
• Separated Drift Field Magmetotransistor with a p^+ Ring around an Emitter
• Design and Fabrication of Electromagnetic Micromirror with Bulk Silicon Mirror Plate and Aluminum Spring
• Association of Interleukin-1 Receptor Antagonist Gene Polymorphism With Response to Conservative Treatment of Lumbar Herniated Nucleus Pulposus
• Comparison of Cervical Spine Biomechanics After Fixed- and Mobile-Core Artificial Disc Replacement : A Finite Element Analysis
• Effect of Retropharyngeal Steroid on Prevertebral Soft Tissue Swelling Following Anterior Cervical Discectomy and Fusion
• Fabrication and Experiment of Planar Micro Ion Drag Pump
• The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors
• Assessment of Pedicle Perforation by the Cervical Pedicle Screw Placement Using Plain Radiographs : A Comparison With Computed Tomography

もっと見る 閉じる

スポンサーリンク