A Novel Micromachining Technique to Fabricate Released GaAs Microstructures with a Rectangular Cross Section
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2003-01-15
著者
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Park S
Univ. Chicago Illinois
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Park S
School Of Electrical Engineering And Computer Science Asri/isrc/erc-nbs Seoul National University
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PARK Sangjun
School of Electrical Engineering, Seoul National University
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Park Sangjun
School Of Electrical Engineering Seoul National University
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CHO Dongil
School of Electrical Engineering and Computer Science, Seoul National University
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PAIK Seung-Joon
School of Electrical Engineering and Computer Science, ASRI/ISRC/ERC-NBS, Seoul National University
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KIM Jongpal
School of Electrical Engineering and Computer Science, ASRI/ISRC/ERC-NBS, Seoul National University
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KIM Setae
School of Electrical Engineering and Computer Science, ASRI/ISRC/ERC-NBS, Seoul National University
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KOO Chiwan
School of Electrical Engineering and Computer Science, ASRI/ISRC/ERC-NBS, Seoul National University
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LEE Seung-Ki
Department of Electrical Engineering, Dankook University
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Kim Setae
School Of Electrical Engineering And Computer Science Asri/isrc/erc-nbs Seoul National University
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Cho Dongil
School Of Electrical Engineering And Computer Science Asri/isrc/erc-nbs Seoul National University
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Koo Chiwan
School Of Electrical Engineering And Computer Science Asri/isrc/erc-nbs Seoul National University
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Paik Seung-joon
School Of Electrical Engineering And Computer Science Asri/isrc/erc-nbs Seoul National University
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Kim J
豊橋技科大 工
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Lee Seung-ki
Department Of Electrical Engineering Dankook University
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Lee Seung-ki
Department Of Electrial Engineering Dankook University
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Kim Jongpal
School Of Electrical Engineering And Computer Science Asri/isrc/erc-nbs Seoul National University
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Cho Dongil
School of Electrical Engineering and Computer Science, ASRI/ISRC/ERC-NBS, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea
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Park Sangjun
School of Electrical Engineering and Computer Science, ASRI/ISRC/ERC-NBS, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea
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- A Novel Micromachining Technique to Fabricate Released GaAs Microstructures with a Rectangular Cross Section
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