A New Micromachining Technique with (111) Silicon
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-05-15
著者
-
Cho D‐i
School Of Electrical Engineering Seoul National University
-
LEE Sangwoo
School of Electrical Engineering, Seoul National University
-
PARK Sangjun
School of Electrical Engineering, Seoul National University
-
CHO Dong-il
School of Electrical Engineering, Seoul National University
-
Lee Sangwoo
School Of Electrical Engineering Seoul National University
-
Cho Dong-il
School Of Electrical Engineering Seoul National University
-
Park S
School Of Electrical Engineering Seoul National University
-
Park Sangjun
School Of Electrical Engineering Seoul National University
-
Cho Dong-il
School of Electrical Engineering and Computer Engineering, ASRI and ISRC, Seoul National University
関連論文
- A New Micromachining Technique with (111) Silicon
- A Novel Micromachining Technique to Fabricate Released GaAs Microstructures with a Rectangular Cross Section
- Mesa-supported, Single-crystal Microstructures Fabricated by the Surface/Bulk Micromachining Process
- A Robust Control for Engine and Transmission Systems : Enhancement of Shift Quality