The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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Kim Y‐k
Hantech Co. Ltd. Kyungki‐do Kor
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Park J‐g
Dep. Metallurgy And Materials Engineering Hanyang Univ. Ansan Kor
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Kim Y‐k
School Of Electrical Engineering Seoul National University
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Kwon Myong-jong
Research Center For Electronic Materials And Components And Department Of Metallurgy And Materials E
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Kim Yong-Kweon
School of Electrical Engineering and Computer Science, Seoul National University
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PARK Jin-Goo
Research Center for Electronic Materials and Components and Department of Metallurgy and Materials E
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LEE Sang-Ho
Research Center for Electronic Materials and Components and Department of Metallurgy and Materials E
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LEE Kang-Kuk
Research Center for Electronic Materials and Components and Department of Metallurgy and Materials E
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SHIN Hyung-Jae
Core Technology Research Center, Samsung Electronics Co., Ltd.
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Kim Yong-kweon
School Of Computer And Electrical Engineering Seoul National University
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Shin Hyung-jae
Core Technology Research Center Samsung Electronics Co. Ltd.
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Lee Sang-ho
Research Associate Department Of Precision Mechanical Engineering Hanyang University
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Lee Sang-ho
Research Center For Electronic Materials And Components And Department Of Metallurgy And Materials E
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Lee Kang-kuk
Research Center For Electronic Materials And Components And Department Of Metallurgy And Materials E
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