Fabrication and Experiment of Planar Micro Ion Drag Pump

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概要

• 論文の詳細を見る

• A micro ion drag pump with planar electrodes on a glass substrate is fabricated and tested. The pump consisted of a 2-dimensional electrode pair array is driven by DC voltage using unipolar conduction. Ethyl alcohol is pumped in both directions, and the flow rate and the pressure are measured, in channels of depth 100μm or 200μm and width fixed at 3mm. It is found that the pump could be fabricated easily and at lower cost than the micro ion drag pumps previously investigated.

• 社団法人 電気学会の論文
• 1998-05-01

著者

• Kim Yong-kweon

  School Of Electrical Engineering Seoul National University

• Kim Yong-kweon

  School Of Computer And Electrical Engineering Seoul National University

• Ahn Si-Hong

  School of Electrical Engineering, Seoul National University

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