電磁力で駆動する45度可動マイクロミラーの製作と實驗
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概要
- 論文の詳細を見る
- 2000-12-19
著者
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Kim Yong-Kweon
School of Electrical Engineering and Computer Science, Seoul National University
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Kim Yong-kweon
School Of Computer And Electrical Engineering Seoul National University
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Jang Yun-ho
School Of Computer And Electrical Engineering Seoul National University
関連論文
- Cold- and hot-switching lifetime characterizations of ohmic-contact RF MEMS switches
- The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors
- Anisotropic Bulk Etching of (110) Silicon with High Aspect Ratio
- Silver Nanoparticle-Embedded Platforms for High Throughput Screening of Proteins
- Fabrication and Experiment of Novel Type Electrohydrodynamic Micropump
- 陽極接合を用いるマイクロXY-ステイジの設計と製作
- 電磁力で駆動する45度可動マイクロミラーの製作と實驗
- Surface-Enhanced Raman Spectroscopic Encoded Magnetic Beads for Multiplex Protein Analyses
- Design and Fabrication of Electromagnetic Micromirror with Bulk Silicon Mirror Plate and Aluminum Spring
- Fabrication and Experiment of Planar Micro Ion Drag Pump
- The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors