Design and Fabrication of Electromagnetic Micromirror with Bulk Silicon Mirror Plate and Aluminum Spring

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概要

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• We have designed and fabricated an electromagnetic micromirror with a flat mirror plate capable of large angular deflection. Single-crystal silicon is used as a mirror plate to obtain an optically flat reflective surface. By a combination of surface and bulk micromachining processes, the single-crystal silicon mirror plate is connected to the substrate via an aluminum spring. which occupies a relatively small area without compromising the compliance. The proposed fabrication process can be applied to the fabrication of devices in which a flat moving part is supported by a compliant spring structure. Nickel electroplated onto the mirror plate enables a mirror rotation angle of up to 84.8° by applying an external magnetic field vertical to the substrate. This designed structure can be used individually or as an array in microphotonic applications.

• 社団法人応用物理学会の論文
• 2000-12-30

著者

• Kim Yong-kweon

  School Of Computer And Electrical Engineering Seoul National University

• Ji Chang-hyeon

  School Of Electrical & Computer Engineering Seoul National University

• CHUNG Gyo-Bum

  School of Electrical, Electronic & Computer Engineering, Hongik University

• Chung Gyo-bum

  School Of Electrical Electronic & Computer Engineering Hongik University

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