Effect of Duty Cycle on Atmospheric Plasma Generation using Micromachined Electrodes

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概要

• 論文の詳細を見る

• We report the effect of a pulse bias scheme on atmospheric plasma generation utilizing micromachined electrodes. Taking advantage of a micron size gap in the microelectrode, a relatively low voltage of less than 300 V becomes usable for atmospheric plasma generation and a large volume of atmospheric plasma was demonstrated on an array of microelectrodes by optimizing the duty cycle of a pulse voltage. Thermal images during plasma generation revealed a significant change in device temperature depending on the microsecond duty cycle. The elevated temperature of the device affects current–voltage ($I$–$V$) characteristics of the glow discharge and appears to be responsible for glow-arc transition for a longer duty cycle.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2009-04-25

著者

• Kim Joohwan

  School Of Electrical Engineering Seoul National University

• Kim Youngmin

  School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Republic of Korea

• Kim Youngmin

  School of Electrical Engineering, Hong-Ik University, 72-1 Sangsu-dong, Mapo-gu, Seoul 121-791, Korea

• Kim Joohwan

  School of Electrical Engineering, Hong-Ik University, 72-1 Sangsu-dong, Mapo-gu, Seoul 121-791, Korea

• Jin Junhyo

  School of Electrical Engineering, Hong-Ik University, 72-1 Sangsu-dong, Mapo-gu, Seoul 121-791, Korea

• Kim Youngmin

  School of Electrical and Computer Engineering, UNIST (Ulsan National Institute of Science and Technology)

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