Construction of Injection Mold with MEMS RTD Sensor and MEMS Heater for Micro/Nano Molding Process
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概要
- 論文の詳細を見る
It is a very critical process to control the temperature of stamper surface in the micro/nano molding. During the filling stage, the polymer melt in the vicinity of the stamper surfaces rapidly solidifies and the solidified layer greatly deteriorates the transcribability and fluidity of polymer melt. To improve the transcribability and fluidity of polymer melt, stamper surface temperature should be controlled such that the growth of the solidified layer is delayed during the filling stage. In this study, an injection mold was prepared with microelectromechanical systems (MEMS) resistance temperature detector (RTD) sensor and MEMS heater to increase the stamper surface temperature over the glass transition temperature during the filling stage. We could control the stamper surface temperature up to 100°C within a few seconds using the fabricated MEMS heater. Finally, the high density optical disc substrates were replicated using the injection mold with MEMS heater and MEMS sensor.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-05-15
著者
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Kim Youngmin
School Of Electrical Engineering Hong-ik University
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Kang Shinill
School Of Mechanical Engineering Yonsei University
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Kim Young-joo
Graduate Program In Information Storage Engineering Yonsei University
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Choi Yong
School Of Medicine Sungkyunkwan University
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Kim Young-Joo
Graduate Program in Information Storage Engineering and Center for Information Storage Device, Yonsei University, 134 Shinchon-dong, Sudaemoon-Ku, Seoul 120-749, Korea
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Kim Young-Joo
Graduate Program in Information Storage Engineering, Yonsei University, 134 Shinchon-dong, Seodaemoon-ku, Seoul, Korea
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Kim Youngmin
School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Republic of Korea
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Kim Youngmin
School of Mechanical Engineering, Yonsei University, 134 Shinchon-dong, Seodaemoon-ku, Seoul, Korea
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Choi Yong
School of Mechanical Engineering, Yonsei University, 134 Shinchon-dong, Seodaemoon-ku, Seoul, Korea
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Kim Youngmin
School of Electrical and Computer Engineering, UNIST (Ulsan National Institute of Science and Technology)
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